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Fortrend Selected by Tegal's Sputtered Films Subsidiary to Provide Automated Reticle Handling for Thin-Film Deposition Tool.


Business Editors/High-Tech Writers

SUNNYVALE, Calif.--(BUSINESS WIRE)--Oct. 24, 2003

Fortrend Corporation, an automation supplier for the semiconductor industry, announced today that the Sputtered Films (SFI SFI Sustainable Forestry Initiative (forest certification program of AF&PA)
SFI Santa Fe Institute (scientific research in Santa Fe, New Mexico)
SFI Science Foundation Ireland
SFI Six Figure Income
) subsidiary of Tegal Corporation, a leading semiconductor equipment supplier, has selected Fortrend to provide automated reticle ret·i·cle  
n.
A grid or pattern placed in the eyepiece of an optical instrument, used to establish scale or position.



[Latin r
 handling for SFI's Endeavor EUV EUV Extreme Ultraviolet
EUV Exclusive Use Vehicle
EUV Extreme Ultra Violet
 thin-film deposition tool.

Sputtered Films' Endeavor EUV tool will utilize Fortrend's PLUS(TM) Reticle Front End to move, flip and rotate reticles between SMIF SMIF Standard Mechanical Interface
SMIF Stream-based Model Interchange Format
SMIF Shared Materials Instrumentation Facility (Duke University)
SMIF Stanford Management Internship Fund
SMIF SMAD4-Interacting Transcription Factor
 pods and SFI's thin-film deposition tool. The PLUS(TM) Reticle Front End incorporates the latest PLUS-500T-ret reticle handling and robot technologies to provide maximum flexibility for reticle handling requirements with minimum cost and footprint. Fortrend advanced control and software technologies also provide seamless, reliable tool integration further enhancing significant cost savings. Fortrend President and CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board.  Chris Wu said, "We are leveraging our years of expertise in semiconductor automation to address the reticle market in a creative way that eliminates extra hardware and operation steps. By combining multiple functionalities in our standard automation components we can address the majority of reticle handling issues that results in immediate benefits for our customers."

About Tegal

Tegal Corporation, headquartered in Petaluma, Calif., is a leading designer and manufacturer of plasma etch and deposition systems used in the production of MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. , smart cards Example of widely used contactless smart cards are Hong Kong's Octopus card, Paris' Calypso/Navigo card and Lisbon' LisboaViva card, which predate the ISO/IEC 14443 standard. The following tables list smart cards used for public transportation and other electronic purse applications. , opto-telecom devices, integrated circuits Integrated circuits

Miniature electronic circuits produced within and upon a single semiconductor crystal, usually silicon. Integrated circuits range in complexity from simple logic circuits and amplifiers, about 1/20 in. (1.
 (ICs), and other related microelectronics devices. Both etching and deposition are key process steps and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world. More information is available on the Internet at www.tegal.com.

About Fortrend

Fortrend Corporation is a leading global supplier of cassette, wafer and photo mask automation equipment. Fortrend offers solar cell automation, mass wafer transfer systems, SMIF load/unload equipment and automated front ends for wafers and reticles. Fortrend's customers include photo mask, microelectronics, solar cell manufacturers and semiconductor equipment suppliers throughout North America, Europe, Japan and the Asia-Pacific region.

Additional information on Fortrend Corporation can be obtained by contacting Fortrend at 404 Tasman Dr., Sunnyvale CA 94089 or accessing its homepage at http://www.fortrend.com.
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Copyright 2003, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Geographic Code:1USA
Date:Oct 24, 2003
Words:352
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