FSI International Signs OEM Agreement With DNS Korea Co., Ltd.

Business Editors & High Tech Writers

MINNEAPOLIS--(BUSINESS WIRE)--May 1, 2001

FSI International, Inc. (Nasdaq:FSII) announced today it has signed an OEM business agreement with Digital Neo-tech System Korea Co., Ltd., (KDNS), a leading Korean manufacturer in semiconductor and flat panel display equipment. FSI will provide its YieldUP, 2100 STG/oo Rinse Dry Integration Modules to be integrated into new KDNS automated wet bench equipment and to upgrade existing multi-supplier wet benches in the field. FSI's proprietary STG rinse/dry technology helps eliminate water spots that can be left by conventional rinse/dry equipment.

"The growing customer base for STG technology find that our rinse/dry capability enhances the performance of traditional wet benches," said John Ely, president of FSI's Surface Conditioning Division. "We are pleased to have a partner of KDNS' reputation using this technology for its 200 mm and 300 mm state-of-the-art cleaning requirements. It is FSI's intent to offer its worldwide customer base a total cleaning solution. We fulfill this broad strategy through our own products and OEM product enhancements to provide the customers with solutions that best suit their specific needs."

"We feel with FSI we are partnering with a technology leader in cleaning," said Dr. Chang-Hyun Park, KDNS CEO and president. "We also acknowledge the confidence FSI has placed in KDNS to support their customers in Korea and this mutual collaboration will bring us a high level of synergy in the future."

FSI's patented Surface Tension Gradient(TM) (STG) drying technology effectively prevents the formation of watermarks and stains on dried wafers, after any wet process. An environmentally friendly technology, it uses minimal chemicals (less than two milliliters of isopropyl alcohol per run) and provides a rinse/dry process that is particle-neutral and watermark-free. The OEM immersion rinse dry units can be used on a variety of substrates, including wafers, disks and flat panels. FSI International, Inc. is a leading global supplier of processing equipment used at key production steps to manufacture microelectronics. The company develops, manufactures, markets and supports products used in the technology areas of microlithography and surface conditioning. FSI International's customers include microelectronics manufacturers located throughout North America, Europe, Japan and the Asia-Pacific region. The company maintains a Web site at www.fsi-intl.com.