FSI International Reports Strong Order Activity for Its Immersion Systems.

Business Editors

MINNEAPOLIS--(BUSINESS WIRE)--Dec. 7, 2000

FSI International, Inc. (Nasdaq:FSII) announced today it has received multiple customer orders for YieldUP(R) 2100 STG(TM) Rinse Dry Integration Modules in its first quarter FY2001. Repeat customers ordered more than 60 OEM units that will be used in wet bench installations for 150mm, 200mm and 300mm semiconductor manufacturing.

"STG rinse dry technology, which is exceptionally robust and scalable to larger wafer sizes, is becoming the dry technology of choice for both 200mm and 300mm manufacturing," says John Ely, president of the Surface Conditioning Division. "Consequently there is a strong end-user demand. As we streamline our manufacturing process to offer standard kits of the YieldUP 2100 Modules, both wet bench manufacturers and end users benefit from shorter lead time and quicker installations."

FSI's patented Surface Tension Gradient(TM) (STG) drying technology, incorporated with its patented CleanPOINT(R) electrostatic POU filtration module, effectively prevents the formation of watermarks and stains on dried wafers, after any wet process. An environmentally friendly technology, it uses minimal chemicals (less than 2 mL IPA) and guarantees a rinse/dry process that is particle-neutral and watermark-free.

YieldUP 2100 modules are OEM immersion rinse dry units that can be used on a variety of substrates, including wafers, disks, and flat panels. The YieldUP 2100 modules sell for prices ranging from $125K to $200K.

FSI International, Inc. is a leading global supplier of processing equipment used at key production steps to manufacture microelectronics. The company develops, manufactures, markets and supports products used in the technology areas of microlithography, surface conditioning and low-k spin-on dielectrics. FSI International's customers include microelectronics manufacturers located throughout North America, Europe, Japan and the Asia-Pacific region.

Additional information on FSI International can be obtained by accessing its homepage at http://www.fsi-intl.com.