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FSI International Announces Turnkey Slurry Project for Texas Instruments.

MINNEAPOLIS--(BUSINESS WIRE)--April 27, 1998--FSI International, Inc. (Nasdaq: FSII FSII Fuel System Icing Inhibitor (MIL-I-27686) ), a leading supplier of capital equipment for the microelectronics industry, today announced it is providing P4400 Slurry Blending and Distribution Systems for installation at two Texas Instruments See TI.

(company) Texas Instruments - (TI) A US electronics company.

A TI engineer, Jack Kilby invented the integrated circuit in 1958. Three TI employees left the company in 1982 to start Compaq.
 (TI) facilities in Dallas. Shipment of this order is occurring in March and April 1998, with installation currently underway. TI, the world's leading designer and supplier of digital signal processing See DSP.

Digital Signal Processing - (DSP) Computer manipulation of analog signals (commonly sound or image) which have been converted to digital form (sampled).
 solutions, will use the P4400 units for both oxide and tungsten slurry in the manufacture of these devices. Digital signal processing solutions are the engines that drive digitization in electronics.

"We are pleased that Texas Instruments has selected FSI FSI Foreign Service Institute
FSI Fluid Structure Interaction
FSI Fuel Stratified Injection
FSI Federazione Scacchistica Italiana (Italian Chess Federation)
FSI Free Standing Insert
FSI Flight Simulator
 to support its chemical-mechanical polishing (CMP CMP (cytidine monophosphate): see cytosine.

(1) (CMP Media LLC, Manhasset, NY, Part of United Business Media, CMP is a leading integrated media company that offers a wide variety of publications and services in the information
) process," said John Delebo, sales and marketing manager of FSI's Chemical Management Division. "TI's selection was made after an in-depth technical review based on FSI's technology and ability to meet its requirements."

FSI's patented vacuum pressure transfer technology, employed in the P4400 system, uses a Venturi venturi

a tube with a decrease in the inside diameter that is used to increase the flow velocity of the fluid and thereby cause a pressure drop; used to measure the flow velocity (a venturimeter) or to draw another fluid into the stream.
 vacuum to fill vessels and humidified high-purity nitrogen to dispense the chemical. The P4400 system draws chemicals from source containers and blends them to predetermined pre·de·ter·mine  
v. pre·de·ter·mined, pre·de·ter·min·ing, pre·de·ter·mines
1. To determine, decide, or establish in advance:
 mix ratios. The mixed solution is then dispensed to the fab using two vacuum pressure vessels. This method provides a smooth transfer of liquids as one vessel fills while the other dispenses. The smooth transfer is critical to effective CMP operations.

The P4400 systems for TI will include day tanks, chemical instrumentation packages and external filtration. FSI's turnkey package includes design services, valve box See Valve chest  and piping installation, and the FSI Chemical Management System (CMS (1) See content management system and color management system.

(2) (Conversational Monitor System) Software that provides interactive communications for IBM's VM operating system.

The Chemical Management Division supplies a wide range of chemical blending and delivery products and total systems support for microelectronics manufacturers worldwide. The division maintains a leadership role in the development of slurry blending and delivery technology for the chemical-mechanical polishing process. FSI Chemical Management Europe, Ltd. (FSI-CME) provides chemical management products and support for the European market. FSI Chemical Management Company-Korea, Ltd. (FSI-CMK) provides chemical management support and turnkey installation services to its customers in Korea. The division has design and manufacturing facilities in Chaska, Minn.; Hollister, Calif. and Newhaven, England.

FSI International, Inc. is a leading global supplier of processing equipment used at key production steps to manufacture microelectronics, including semiconductor devices, thin film heads, flat panel displays and multichip modules. The company develops, manufactures, markets and supports products used in the technology areas of microlithography, surface conditioning and chemical management. FSI International's customers include microelectronics manufacturers located throughout North America, Europe, Japan and the Asia-Pacific region. -0-

Additional information on FSI International can be obtained by accessing its homepage at

CONTACT: FSI International

Laurie Walker, (612) 448-8066


Heide Erickson, (612) 361-7648
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Publication:Business Wire
Date:Apr 27, 1998
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