FSI International Announces Turnkey Slurry Project for Texas Instruments.
"We are pleased that Texas Instruments has selected FSI to support its chemical-mechanical polishing (CMP) process," said John Delebo, sales and marketing manager of FSI's Chemical Management Division. "TI's selection was made after an in-depth technical review based on FSI's technology and ability to meet its requirements."
FSI's patented vacuum pressure transfer technology, employed in the P4400 system, uses a Venturi vacuum to fill vessels and humidified high-purity nitrogen to dispense the chemical. The P4400 system draws chemicals from source containers and blends them to predetermined mix ratios. The mixed solution is then dispensed to the fab using two vacuum pressure vessels. This method provides a smooth transfer of liquids as one vessel fills while the other dispenses. The smooth transfer is critical to effective CMP operations.
The P4400 systems for TI will include day tanks, chemical instrumentation packages and external filtration. FSI's turnkey package includes design services, valve box and piping installation, and the FSI Chemical Management System (CMS).
The Chemical Management Division supplies a wide range of chemical blending and delivery products and total systems support for microelectronics manufacturers worldwide. The division maintains a leadership role in the development of slurry blending and delivery technology for the chemical-mechanical polishing process. FSI Chemical Management Europe, Ltd. (FSI-CME) provides chemical management products and support for the European market. FSI Chemical Management Company-Korea, Ltd. (FSI-CMK) provides chemical management support and turnkey installation services to its customers in Korea. The division has design and manufacturing facilities in Chaska, Minn.; Hollister, Calif. and Newhaven, England.
FSI International, Inc. is a leading global supplier of processing equipment used at key production steps to manufacture microelectronics, including semiconductor devices, thin film heads, flat panel displays and multichip modules. The company develops, manufactures, markets and supports products used in the technology areas of microlithography, surface conditioning and chemical management. FSI International's customers include microelectronics manufacturers located throughout North America, Europe, Japan and the Asia-Pacific region. -0-
Additional information on FSI International can be obtained by accessing its homepage at http://www.fsi-intl.com.
CONTACT: FSI International
Laurie Walker, (612) 448-8066
Heide Erickson, (612) 361-7648