Extreme ultraviolet reflectivity intercomparison. (News Briefs).In the microelectronics industry, the number of transistors on an integrated-circuit chip doubles about every 18 months (Moore's Law). This accomplishment has been made possible by utilizing shorter and shorter wavelengths of radiation for photolithography. Today, leading manufacturers are pushing deeper into the ultraviolet spectrum. However, the end is in sight for further incremental changes. Very different technology will be required for wavelengths shorter than 157 nm. A number of leading chip companies have formed the EUV EUV Extreme Ultraviolet EUV Exclusive Use Vehicle EUV Extreme Ultra Violet LLC (Logical Link Control) See "LANs" under data link protocol. LLC - Logical Link Control research consortium to develop next-generation manufacturing technology. Extreme ultraviolet (EUV) radiation at 13.4 nm holds promise because of the fortuitous high reflectivity of Mo/Si multilayer mirrors at this wavelength. The NIST/DARPA Reflectometry Facility at NIST's Synchrotron Ultraviolet Radiation Facility (SURF) was established in anticipation of these needs. It is the only facility in the world capable of making a complete measurement of reflectivity on the large mirrors being used by EUV LLC in their engineering test stand, an instrument intended to provide the foundation for the ultimate design of an EUV lithographic lith·o·graph n. A print produced by lithography. tr.v. lith·o·graphed, lith·o·graph·ing, lith·o·graphs To produce by lithography. tool. A just-completed international intercomparison confirmed NISTs capabilities. Seven test samples were studied by NIST (National Institute of Standards & Technology, Washington, DC, www.nist.gov) The standards-defining agency of the U.S. government, formerly the National Bureau of Standards. It is one of three agencies that fall under the Technology Administration (www.technology. , PTB PTB Physikalisch Technische Bundesanstalt (Germany) PTB Partido Trabalhista Brasileiro (Brazilian Labor Party) PTB Phosphotyrosine-Binding PTB Powers That Be PTB Power Tab , Lawrence Berkeley Laboratory, ASET ASET Alberta Society of Engineering Technologists (Canada) ASET Automated Security Enhancement Tool ASET Australian Society for Educational Technology ASET Application Specific Engine Technology (a Japanese consortium), and the Himejii Institute of Technology (Japan). CONTACT: Thomas Lucatorto, (301) 975-3734; thomas.lucatorto@nist.gov. |
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