Entegris Launches New Photochemical Dispense System; IntelliGen(R) Mini Earns Positive Customer Evaluations - Product Shipments Underway.CHASKA, Minn. -- Entegris, Inc. (Nasdaq:ENTG) announced today it is introducing its new IntelliGen(R) Mini photochemical photochemical in laser treatment, the laser light is absorbed and converted into chemical energy. dispense system at the semiconductor global trade show SEMICON SEMICON Semiconductors Equipment and Material International Conference West in San Francisco San Francisco (săn frănsĭs`kō), city (1990 pop. 723,959), coextensive with San Francisco co., W Calif., on the tip of a peninsula between the Pacific Ocean and San Francisco Bay, which are connected by the strait known as the Golden next week. The IntelliGen(R) Mini dispense system delivers highly accurate point-of-use photochemical dispense across a wide range of conditions. Product shipments began earlier this year. Advanced photochemicals used in dispense and coating processes at the 193 nanometer (nm) level and below are very sensitive to gas microcontamination, pressure and vacuum shock. In response, Entegris designed this patented, two-stage technology that provides maximum contamination control Procedures to avoid, reduce, remove, or render harmless (temporarily or permanently) nuclear, biological, and chemical contamination for the purpose of maintaining or enhancing the efficient conduct of military operations. , while reducing pressure and vacuum shock. It also enables filtration to occur at a rate independent of the dispense. This allows the use of 10 nanometer and lower pore sizes, enabling maximum defect reduction and higher yields. The IntelliGen(R) Mini dispense system prevents micro bubble formation in even the most sensitive photochemicals, and its 50-percent size reduction from earlier dispense system models makes it ideal for both new track installations and existing pump retrofits. "The IntelliGen Mini's unique two-stage technology and compact size are a leap forward in dispense control, and the response by some of the top OEMs and IDMs using it in the first three months of introduction of this advanced technology has been great," said Todd Edlund, vice president and general manager of liquid systems for Entegris. "Based on these first results, we're excited that this new product will be an attractive and effective solution for both new tools, and the retrofit ret·ro·fit v. ret·ro·fit·ted or ret·ro·fit, ret·ro·fit·ting, ret·ro·fits v.tr. 1. To provide (a jet, automobile, computer, or factory, for example) with parts, devices, or equipment not in of existing tools in the fab." ABOUT ENTEGRIS Entegris (merged with Mykrolis in August 2005) is the global leader in materials integrity management - delivering a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high tech industries. Entegris is ISO (1) See ISO speed. (2) (International Organization for Standardization, Geneva, Switzerland, www.iso.ch) An organization that sets international standards, founded in 1946. The U.S. member body is ANSI. 9001 certified and has manufacturing, customer service or research facilities in the United States United States, officially United States of America, republic (2005 est. pop. 295,734,000), 3,539,227 sq mi (9,166,598 sq km), North America. The United States is the world's third largest country in population and the fourth largest country in area. , China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com. |
|
||||||||||||||||
Printer friendly
Cite/link
Email
Feedback
Reader Opinion