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Entegris Launches New Integra Valves at SEMICON China; New Valves Increase Resistance to Basic pH Chemistries for Semiconductor Manufacturers.


Business Editors/High-Tech Writers

SEMICON SEMICON Semiconductors Equipment and Material International Conference  China 2003

CHASKA, Minn.--(BUSINESS WIRE)--March 12, 2003

Entegris, Inc., (Nasdaq:ENTG) the materials integrity management company, today launched its new injection-molded Integra(R) valve product line, which utilizes ethylene-chlorotrifluoroethylene (ECTFE ECTFE Ethylene Chlorotrifluoroethylene ) for non-wetted components. This material is designed to increase the valves' resistance to basic pH chemistries widely used in the semiconductor industry. Entegris will showcase the new products this week at SEMICON China 2003 in Shanghai.

The new Entegris valves consist of non-wetted components made from Halar(R) ECTFE, a chemically resistant partially fluorinated fluorinated

material to which a fluoride has been added, e.g. water for human consumption treated as a prophylaxis against tooth decay.
 polymer. ECTFE has a higher chemical resistance to oxygenated solvents and bases, compared to other partially fluorinated polymers. Thus, increasing product performance in protecting and transporting critical fluids in semiconductor manufacturers' caustic environments.

Integra valves are used in chemical distribution units, valve box See Valve chest  manifolds and wet processing equipment where external exposure to base solutions regularly occurs. In this environment, the ECTFE-based components will maintain system uptime, decrease cost of ownership and extend the life of the valve. ECTFE components are available on all Integra valve configurations including one-quarter and one-half inch manual, pneumatic and high-pressure valves.

Entegris will showcase the new Integra valves and several other material integrity management products at SEMICON China, Shanghai New International Exposition Center, March 12-14, Booth #1408, Hall One.

ABOUT ENTEGRIS

Entegris products and services protect and transport the critical materials that enable the world's leading technologies. Entegris is a leading materials integrity management company providing products and services used from production to consumption in the semiconductor, data storage, chemical processing, pharmaceutical, fuel cell and other key technology-driven industries worldwide.

Entegris is headquartered in Chaska, Minnesota This article is about the city of Chaska, Minnesota. For other senses of the word Chaska, see Chaska.
Chaska is a city in Carver County, Minnesota, United States. The population was 17,449 at the 2000 census. It is the county seat of Carver County6.
, USA and has manufacturing facilities in the United States United States, officially United States of America, republic (2005 est. pop. 295,734,000), 3,539,227 sq mi (9,166,598 sq km), North America. The United States is the world's third largest country in population and the fourth largest country in area. , Germany, Japan and Malaysia and is ISO (1) See ISO speed.

(2) (International Organization for Standardization, Geneva, Switzerland, www.iso.ch) An organization that sets international standards, founded in 1946. The U.S. member body is ANSI.
 9001 certified. Directly and through alliances with Metron Technology and other distributors, Entegris provides customer support on six continents. Additional information can be found at www.entegris.com
COPYRIGHT 2003 Business Wire
No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 2003, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Geographic Code:9CHIN
Date:Mar 12, 2003
Words:316
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