Entegris Chambergard(TM) Diffuser Technology Provides Throughput Enhancement for Process Tools.Proven to reduce vent-up time by 65 percent in semiconductor manufacturing environments CHASKA, Minn. -- Entegris' (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on :ENTG), patented Chambergard[TM] technology can significantly increase wafer throughput by reducing load lock vent-up time for deposition and etch To create a design in a material by digging out the material. The circuit designs on printed circuit boards and chips are etched by acid. See chip and printed circuit board. process tools in semiconductor manufacturing. Already widely used on 300mm deposition and etch process tools, Chambergard fast vent diffuser dif·fus·er n. 1. One that diffuses, as: a. A light fixture, such as a frosted globe, that spreads light evenly. b. A medium that scatters light, used in photography to soften shadows. c. technology has been shown to reduce the time required to vent the load lock chamber by 65 percent on installed 200mm tools, while offering a significant improvement in particle reduction. "Innovative application of our patented filtration technology provides semiconductor manufacturers with a low risk and immediate means of improving throughput and reducing particle adders," said Devon Kinkead, vice president and general manager, gas microcontamination, Entegris. "The Chambergard diffuser technology solution is an integral part of any yield improvement and throughput enhancement program." Chambergard uses 0.003 micron filtration technology to maximize the volume of ultra pure vent gas delivered to the chamber, while minimizing the disruption of particles that may be present in the chamber. Chambergard upgrade kits are available for most 200mm deposition and dry etch process tools, and are easily installed with minimal downtime The time during which a computer is not functioning due to hardware, operating system or application program failure. . For more information, please visit Entegris at exhibit # 2B-501 at Semicon Japan, December 6-8. ABOUT ENTEGRIS Entegris is the global leader in materials integrity management - delivering a wide range of products for purifying pu·ri·fy v. pu·ri·fied, pu·ri·fy·ing, pu·ri·fies v.tr. 1. To rid of impurities; cleanse. 2. To rid of foreign or objectionable elements. 3. , protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high tech industries. Entegris is ISO (1) See ISO speed. (2) (International Organization for Standardization, Geneva, Switzerland, www.iso.ch) An organization that sets international standards, founded in 1946. The U.S. member body is ANSI. 9001-certified and has manufacturing, customer service or research facilities in the United States United States, officially United States of America, republic (2005 est. pop. 295,734,000), 3,539,227 sq mi (9,166,598 sq km), North America. The United States is the world's third largest country in population and the fourth largest country in area. , China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com. Chambergard[TM] is a trademark of Entegris Inc. |
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