Entegris Adds New Partners in Silicon Wafer Handling Initiative; New Alliance Brings Industry Leaders Together to Promote Thin Wafer Handling Solutions.

Business Editors/High-Tech Writers

SEMICON West 2003

SAN JOSE, Calif.--(BUSINESS WIRE)--July 16, 2003

Entegris, Inc. (Nasdaq:ENTG), the materials integrity management company, announced the addition of eight new partners to the Entegris Ultra-Thin Wafer Partner Program. The program is a non-exclusive open alliance to support thin silicon wafer handling in the semiconductor industry. Under the terms of the agreement, the companies will join forces to promote integrated solutions for semiconductor wafer thinning and stress removal, along with advanced techniques for thin wafer handling and transport. The alliance also calls for all companies to engage in joint marketing initiatives.

Current global partners of the program include: ESEC, PROTEC group AG, Integrated Dynamics Engineering, Silicon Quest International, Dymatix Automation Systems, SEZ Group, Teikoku Taping Systems Co. Ltd. and Carinthian Tech Research AG. Tru-Si, a high technology wafer thinning and handling equipment company, has been involved in the Entegris program since September 2002.

"The purpose of our Ultra-Thin Wafer Partner Program is to demonstrate compatibility between high performance wafer thinning equipment, processes and thin wafer handling, and transport systems," said Patrick McKinney, president of the Entegris semiconductor market segment. "Partnering with these leaders in the industry enables us to maintain and expand our leadership role by creating the next generation of solutions for thin and ultra-thin wafer handling and transport."

The Entegris Ultra-Thin Wafer Partner Program was formed to address wafer integrity, handling and transport issues by bringing together industry leaders to share their expertise and deliver best-of-breed solutions to the industry -- solutions which are essential to protect thin and fragile silicon wafers from contamination and breakage throughout the semiconductor manufacturing process.

Entegris will showcase its complete line of finished wafer handling solutions at SEMICON West in San Jose, Calif., July 16-18, McEnery Hall, Booth #10428.

ABOUT ENTEGRIS

Entegris products and services protect and transport the critical materials that enable the world's leading technologies. Entegris is a leading materials integrity management company providing products and services used from production to consumption in the semiconductor, data storage, chemical processing, pharmaceutical, fuel cell and other key technology-driven industries worldwide.

Headquartered in Chaska, Minn., Entegris has manufacturing facilities in the United States, Germany, Japan and Malaysia and is ISO 9001 certified. Directly and through alliances with Metron Technology and other distributors, Entegris provides customer support on six continents. Additional information can be found at www.entegris.com