Entegris' Newest Manifold Valves Allow Easy Replacement of Individual Valves; Small Footprint Ideal for CMP and Other Process Tools Where Space is Limited.

Business Editors/High-Tech Writers

CHASKA, Minn.--(BUSINESS WIRE)--July 10, 2000

Entegris, a critical materials management company, today announced the introduction of its FlareMount(TM) mounting technology, which seals the award-winning Galtek(R) SG valves into a surface-mount manifold configuration using industry-proven Flaretek(R) fitting technology. These manifolds are ideal for ultrapure and corrosive applications where space is limited, such as in chemical mechanical planarization (CMP) polishers and other process tools. This manifold, which extends Entegris' line of industry-proven Galtek valves introduced last year, utilizes a modular method of mounting valves to a manifold block.

Historically, when one valve in a manifold failed, the only option was to discard the manifold and replace it with a new one; however, when using Entegris' FlareMount technology, original equipment manufacturers (OEMs) can easily replace individual valves rather than discard an entire manifold. This "replaceability" helps extend the life of process tools and lowers the cost of ownership (CoO) for OEMs. Incorporating the Flaretek fitting technology provides a leak-free seal and eliminates the need for additional parts such as gaskets and o-rings, which are required in traditional surface mount valve designs. Fewer connections minimize potential leak points and decrease installation time.

"To help lower cost of ownership, customers have been seeking ways to increase manifold utilization within their process tools, but this requires field reparability. The new Galtek SG surface-mount manifold valve features the design flexibility and small footprint that enable customers to get more process capability into a smaller package," stated Frank Sidell, senior vice president of Entegris' Critical Fluid Management.

The Galtek SG surface-mount manifold valve is the latest addition to Entegris' Galtek SG line of two-way and three-way valves, which was selected in 1999 as one of Semiconductor International's Editor's Choice Best Products of the Year award. The new valve features a 1/4-inch orifice -- the smallest of its kind offering perfluoroalkoxy (PFA) wetted surfaces for use in high-purity and corrosive semiconductor applications such as CMP, photoresist and valve boxes.

The Galtek surface-mount manifold valve is available now.

About Entegris

From production to consumption, Entegris assures the integrity of its customers' critical materials in the semiconductor, data storage, chemical processing, pharmaceutical and other key technology-driven industries worldwide. Headquartered in Chaska, Minn., Entegris is a leading provider of materials management products and services.

Entegris has manufacturing facilities in the United States, Germany, Japan, Malaysia and South Korea and is ISO 9001 certified. Through strategic alliances with Metron Technology, Marubeni and other distributors, Entegris provides customer support on six continents. Additional information can be found at www.entegris.com.