EV Group to supply Beijing Nanotechnology Center.EV Group (EVG, Scharding, Austria, www.evgroup.com), a manufacturer of microelectro-mechanical systems (MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. ) and semiconductor wafer processing equipment, has announced the successful installation of several advanced wafer processing tools at Tsinghua-Foxconn Nanotechnology Center at National Tsinghua University (NTHU NTHU National Tsing-Hua University (China) , Beijing, China, www.tsinghua.edu.cn). NTHU serves as a knowledge site in MEMS and nanotechnology throughout Asia. EVG has installed a resist coating system, a develop system, a cleaner, a precision alignment system for double-side lithography and a hot embossing embossing, process of producing upon various materials designs or patterns in relief by mechanical means. The material is pressed between a pair of dies especially adapted to its hardness and the depth of the design needed. and nanoimprinting system. The manufacturing line covers all process steps for MEMS and nano fabrication. The Tsinghua-Foxconn Nanotechnology Research Center This article or section contains information about a building currently under construction. It may contain information of a speculative nature, and the content may change dramatically as construction progresses and new information becomes available. , a cooperation with Foxconn Group, was completed in July 2003. The center has advanced nanotechnology equipment and testing equipment, as well as facilities for research and communication. |
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