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EV Group Expands UV-Nanoimprint Consortium, Sponsors Canadian Nanotechnology Conference.


SCHARDING, Austria -- EV Group (EVG EVG Elektronisches Vorschaltgerät (German: Electronic Ballast)
EVG Enterrement de Vie de Garçon (French)
EVG Evaluator Group
), a leading manufacturer of MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. , nano and semiconductor wafer-processing equipment, today announced that a major Canadian research organization has joined its nanoimprint lithography Nanoimprint lithography is a novel method of fabricating nanometer scale patterns. It is a simple process with low cost, high throughput and high resolution. It creates patterns by mechanical deformation of imprint resist and subsequent processes.  consortium. In addition, the company announced plans to sponsor and participate in COMS COMS 3Com Corporation (stock symbol)
COMS Certified Orientation and Mobility Specialist
COMS Continuous Opacity Monitoring Systems
COMS City of Manchester Stadium (UK) 
 2004, an Aug. 29-Sept. 2 conference in Edmonton, Alberta, that will focus on the commercialization of nano and MEMS devices.

EV Group, which has the world's largest installed base of nanoimprinting equipment, said the National Research Council of Canada's Industrial Materials Institute (NRC-IMI) joined the consortium that EVG formed last year. The consortium is working to commercialize advanced nanoimprint lithography (NIL) technologies, a next-generation lithography Next-Generation Lithography (NGL) is a term used in integrated circuit manufacturing to describe the lithography technologies slated to replace photolithography beyond the 32 nm node.  method that utilizes a low-cost, high-resolution and large-area patterning process.

Both the consortium and the COMS 2004 sponsorship come on the heels of the company's successful expansion into Canada.

Last fall, the NRC-IMI purchased an EVG520HE semi-automated hot-embossing system to pattern surfaces for various applications, from bio-recognition to magnetic data storage. In addition, DALSA Corp., the Ontario-based maker of processed silicon wafers and packaged silicon chips, purchased EVG's GEMINI wafer bonder cluster tool and a HERCULES thick-polymer lithography tool for high-volume MEMS manufacturing.

"As the leading global supplier of nano-imprint lithography equipment, EV Group is committed to helping our Canadian partners develop and commercialize emerging micro and nanotechnologies," said Dr. Peter Podesser, chief executive officer of EVG. "The NIL consortium is focused on providing total, high-volume nanoimprint lithography solutions, equipment and processes for chemicals, templates and major semiconductor companies."

EV Group is the leading industry sponsor of COMS 2004, and several of its executives and scientists will participate in conference sessions. Dr. Podesser and Dr. Christian Schaefer, senior vice-president of sales, will chair events at the conference. EV Group also will make technical presentations on low-temperature wafer bonding for MEMS packaging, on hot-embossing technology for the fabrication fabrication (fab´rikā´shn),
n the construction or making of a restoration.
 of novel-type microfluidic devices, and on spray coating for industrial high-yield photo-lithography.

NRC-IMI is a leading Canadian research center that conducts multidisciplinary research on breakthrough technologies related to materials development and processing, and is considered a key player in Canada's nanotechnology research and development.

About EV Group

Founded in 1980, EV Group is a global supplier of wafer bonders, aligners, photoresist coaters, cleaners and inspection systems for semiconductor, MEMS and emerging nanotechnology markets. EV Group holds the dominant share of the market for wafer bonding equipment (especially SOI (Silicon On Insulator) A chip architecture that increases transistor switching speed by reducing capacitance (build-up of electrical charges in the transistor's elements), and thus reducing the discharge time. The power requirement is also reduced in some designs.  bonding) and is a leader in lithography for advanced packaging and nanotechnology. The company's unique Triple I approach (Invent - Innovate - Implement) is supported by a vertical infrastructure, allowing EV Group to respond quickly to new technology development, apply the technology to manufacturing challenges and expedite volume production. Headquartered in Scharding, Austria, EV Group operates via a global customer support network, with subsidiaries in Phoenix, Arizona Phoenix /ˈfiːˌnɪks/ (English: Phoenix, Navajo: Hoozdo, lit. "the place is hot", Western Apache: Fiinigis) is the capital and the most populous city of the U.S. ; Cranston, Rhode Island Cranston, once known as Pawtuxet, is a city in Providence County, Rhode Island, United States. With a population of 79,269 as of the 2000 census, it is the third largest city in the state. The center of population of Rhode Island is located in Cranston [2]. ; Yokohama, Japan; and Chung-Li, Taiwan.
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Publication:Business Wire
Date:Aug 25, 2004
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