EKC Technology Announces First Annual Enabling Technology Awards at Semicon Europa.

Business Editors/High-Tech Writers

HAYWARD, Calif.--(BUSINESS WIRE)--April 25, 2001

LETI, FSI International, Semitool, SEZ and BASF recognized for their

process integration work and partnerships with EKC

EKC Technology, a ChemFirst Inc. (NYSE:CEM) company, today recognized five companies at Semicon Europa with their first annual Enabling Technology Awards. The companies who were presented awards at a press conference in Munich were LETI, FSI International, Semitool, SEZ, and BASF. The awards recognized companies that both provided process integration solutions that enabled advances in the semiconductor industry during 2000 and, in their relationship with EKC, contributed state-of-the-art process solutions to the industry.

Contributor Awards

Process Development Partner

LETI, the French research consortium, was recognized for its work with copper and low-k process integration in partnership with EKC.

Equipment Platform Suppliers

FSI International (Nasdaq:FSII) was presented an award for their commitment to the European market and recently developed process equipment. They have installed process equipment in EKC's new Scotland application engineering laboratory with full support of onsite service, process development and maintenance. FSI offers surface conditioning, microlithography and spin-on dielectric process equipment.

Semitool (Nasdaq:SMTL), whose products include batch and single wafer spray surface preparation and cleaning equipment, received the award for having the largest installed base of equipment in support of EKC Technology chemistry. They also were recognized for the placement of equipment in EKC's application laboratory in Japan.

SEZ (SUX:SEZN) was recognized for pioneering single wafer spin cleaning technology in multi-head production tools, which have flexible process platforms and multiple chemistry capability. SEZ produces processing equipment for wet chemical surface preparation of wafers.

Material Supplier Team Work

BASF (NYSE:BAS), one of the world's leading chemical companies, was presented an award to recognize the efforts of a team at the Ludwigshafen facility to support continuity of supply for EKC's patented HDA(R) technology. Last June an explosion in a chemical plant in Japan jeopardized worldwide supply. The team quickly accelerated production of Hydroxylamine Free-Base (HAFB(TM)), a technology used in semiconductor post-etch residue removal, and expanded production to address industry requirements. In cooperation with EKC, BASF effectively managed the supply of HAFB(TM) through a period of high demand.

About EKC Technology

EKC Technology, Inc., a wholly owned subsidiary of ChemFirst Inc., is a worldwide supplier of high purity, patented proprietary chemicals for wafer cleaning, surface preparations, CMP and photoresist/post-etch residue removal for the semiconductor industry. ChemFirst produces chemicals for semiconductor, life science and polyurethane applications. ChemFirst is listed on the New York stock exchange under the trading symbol CEM.

Corporate Headquarters: EKC Technology, Inc. 2520 Barrington Court Hayward, CA USA 94545-1163 510/784-9105 Fax [phone]