EDGE DETECTION AND IMAGE ANALYSIS SOFTWARE PROVIDES NEW INSIGHT TO OVERLAY METROLOGY.New image recognition and quantitative image analysis software has been developed by a NIST (National Institute of Standards & Technology, Washington, DC, www.nist.gov) The standards-defining agency of the U.S. government, formerly the National Bureau of Standards. It is one of three agencies that fall under the Technology Administration (www.technology. researcher for the Overlay Metrology Project. This comprehensive software package is based on the Matlab programming language and tool set and allows the evaluation of numerous effects on algorithm performance. This package has been used to quantify feature roughness and asymmetry Asymmetry A lack of equivalence between two things, such as the unequal tax treatment of interest expense and dividend payments. effects on overlay pattern evaluation used in the feedback and control of lithography stepper step·per n. 1. One that steps, especially in a fast or spirited manner. 2. Informal A dancer. Noun 1. tools. The package also has been used in the quantification of algorithm robustness for sample to noise effects. This code has been used extensively to evaluate and compare several cross-correlation, self-correlation, and new least-squares correlation methods, which are proving to be the most robust edge detection and feature centerline cen·ter·line n. 1. A line that bisects something into equal parts. 2. A painted line running along the center of a road or highway that divides it into two sections for traffic moving in opposite directions, or, in the case of determination methods. |
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