Dr. Samuel H. Fuller Joins Zygo's Board of Directors.

Business Editors

MIDDLEFIELD, Conn.--(BUSINESS WIRE)--June 23, 2003

Zygo Corporation (NASDAQ: ZIGO), a leading worldwide optical metrology supplier, today announced that it has named Dr. Samuel H. Fuller to its board of directors. Dr. Fuller is presently vice president of research and development at Analog Devices Inc. (ADI), a world leading semiconductor company specializing in high-performance analog, mixed-signal, and digital signal processing integrated circuits.

Prior to joining ADI in 1998, Dr. Fuller was vice president of research and chief scientist at Digital Equipment Corporation. In the 1970s, Dr. Fuller was an associate professor of computer science and electrical engineering at Carnegie Mellon University.

ZYGO's chairman and chief executive officer, Bruce Robinson, commented, "In his position at ADI, Sam guides the technology strategy, leads the design tools group and other corporatewide engineering initiatives, and directs ADI's university-based research programs. He has a history of adapting innovative technology to new and successful products. Given the richness of ZYGO's intellectual property, we are extremely pleased to have a technology business leader of such caliber join our board. His guidance will be invaluable as we introduce new technologies to the semiconductor industry."

In addition to his positions with ADI, Dr. Fuller serves on the board of the Corporation for National Research Initiatives, a Washington, DC, organization, researching new networking and information technologies. He has been elected to the National Academy of Engineering, and is a Fellow of the IEEE and AAAS. He was a founding member of the Computer Science and Telecommunication Board of the National Research Council (NRC) and is currently a member of the Division of Engineering and Physical Sciences Board of the NRC.

Zygo Corporation (NASDAQ: ZIGO), headquartered in Middlefield, Connecticut, is a worldwide developer and supplier of high precision optics, optical assemblies, high performance metrology instruments, and automation for the semiconductor and industrial markets. See ZYGO's web site at www.zygo.com for additional information.

This press release may contain forward-looking statements within the meaning of Section 27A of the Securities Act of 1933, as amended, and Section 21 E of the Securities and Exchange Act of 1934, as amended, which reflect the Company's current judgment on certain issues. Because such statements apply to future events, they are subject to risk and uncertainties that could cause the actual results to differ materially. Important factors, which could cause actual results to differ materially, are described in the Company's reports on Form 10-K and 10-Q on file with the Securities and Exchange Commission.