Dainippon Screen Mfg. Co. Ltd.: Low Temperature IPA Drying Technology to Be Incorporated Into Semiconductor Wafer Cleaning Systems.KYOTO, Japan -- Improved Performance, Achieved Wider Range of Applications for Batch Cleaning Systems The Semiconductor Equipment Company (president: Takashige Suetake) of Dainippon Screen Mfg. Co. Ltd. (headquarters: Kamigyo-ku, Kyoto) has recently received a license of patent rights from the large Dutch electronic equipment manufacturer, Royal Philips Electronics. As a result, DNS (Domain Name System) A system for converting host names and domain names into IP addresses on the Internet or on local networks that use the TCP/IP protocol. For example, when a Web site address is given to the DNS either by typing a URL in a browser or behind the will incorporate application technology in its batch(*1) cleaning systems for the wafer drying process. The patented technology that has been licensed in this case is a process using the Marangoni convection(*2). It will be provided in the drying units that are installed on DNS batch cleaning systems. Using that technology will make it possible to conduct the wafer drying process using IPA IPA - International Phonetic Alphabet (isopropyl alcohol isopropyl alcohol: see isopropanol. ) with low temperature condition. That will solve the process problems caused by high temperature IPA dry for the next generation device manufacturing and provide greater freedom of batch cleaning applications. Using the technology will enable DNS to improve the performance of its products, and target further increases in its share of the wafer cleaning equipment market. DNS will start shipping the batch cleaning systems equipped with the technology beginning in July 2004. *1: Batch A method of processing multiple wafers at one time. *2: Marangoni convection The phenomenon by which the surface tension of a liquid such as alcohol changes the flow occurs according to according to prep. 1. As stated or indicated by; on the authority of: according to historians. 2. In keeping with: according to instructions. 3. concentration and temperature distribution. * Please consult about correspondence model separately. About Royal Philips Electronics Royal Philips Electronics of the Netherlands (NYSE NYSE See: New York Stock Exchange :PHG)(AEX AEX See: Amsterdam Exchange :PHI) is one of the world's biggest electronics companies and Europe's largest, with sales of EUR EUR In currencies, this is the abbreviation for the Euro. Notes: The currency market, also known as the Foreign Exchange market, is the largest financial market in the world, with a daily average volume of over US $1 trillion. 29 billion in 2003. It is a global leader in color television sets, lighting, electric shavers, medical diagnostic imaging and patient monitoring, and one-chip TV products. Its 165,300 employees in more than 60 countries are active in the areas of lighting, consumer electronics, domestic appliances, semiconductors, and medical systems. News from Philips is located at www.philips.com/newscenter. |
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