CyberOptics Semiconductor Demonstrates Wireless Measurement Systems for Leveling and Robot Teaching at SEMICON West 2007.

Presentations Highlight Technical Advantages of Precision Measurement Tools for Reducing Cycle Times in Semiconductor Manufacturing

BEAVERTON, Ore. & SAN FRANCISCO -- Auto Leveling Systems, Auto Gapping Systems, and Auto Teaching Systems based on CyberOptics Semiconductor's (CSI) patented WaferSense[TM] technology will be exhibited during SEMICON West 2007 at its Booth No. 5859 in the North Hall at the Moscone Center.

Fab process equipment and maintenance engineers face mounting pressure to increase fab effectiveness. They need highly precise hardware/software solutions to help them increase device yield by achieving more accurate setups and to improve equipment productivity by shortening teaching, setup and maintenance cycles. CSI has addressed this need by innovating wireless tools and software systems that offer unprecedented accuracy and convenience for processes and equipment used in today's fabs.

At SEMICON West, CyberOptics Semiconductor will introduce and demonstrate the WaferSense[TM] Auto Gapping System (AGS), the newest in its lineup of precision wireless wafer-like devices, that measures gaps (i.e., distance) between shower heads and pedestals or heaters that are critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etch. Gap control improves thin film uniformity.

Other show activities at the CSI booth include:

* WaferSense[TM] Auto Leveling System (ALS) demonstration. Using wireless technology, the ALS provides precise pitch and roll measurements - accurate to +-0.03 degrees - that can be logged to document wafer support inclination and determine the ideal tool set-up and for best yields.

* WaferSense[TM] Auto Teaching System (ATS) demonstration. Machine vision technology "sees" inside semiconductor equipment, enabling the ATS to measure three-dimensional offsets to teach robots exact wafer transfer positions resulting in significantly reduced equipment downtime and wafer scrap.

* A presentation by Director of Engineering, Dennis Bonciolini, on the TechXPOT Stage in the North Hall at 4:50 - 5:10 p.m. on July 17. He will present: "Automatic Teaching System (ATS) - Precise Alignments for Improved Process Control."

CyberOptics Semiconductor's WaferSense tools are increasingly recognized as faster, more precise methods for keeping process equipment in alignment and operating within spec, and are gaining momentum at 200mm and 300mm fabs worldwide.

About CyberOptics Semiconductor:

CyberOptics Semiconductor designs and delivers precision products that measure critical parameters in semiconductor processes and equipment. Cyberoptics Semiconductor is a subsidiary of CyberOptics Corp. (Nasdaq:CYBE), one of the world's leading providers of process yield and throughput improvement solutions for the electronic assembly and semiconductor manufacturing industries. For more information, visit the web site at: www.CyberopticsSemi.com, e-mail [e-mail], or call 800-366-9131.

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