Critical data for integrated-circuit manufacturing. (News Briefs).The next generation of microlithography tools under development utilizes deep-ultraviolet radiation near 157 nm. This wavelength is characteristic of molecular fluorine fluorine (fl  `ərēn, –rĭn), gaseous chemical element; symbol F; at. no. 9; at. wt. 18.998403; m.p. −219.6°C;; b.p. −188.14°C;; density 1. lasers and is refracted re·fract tr.v. re·fract·ed, re·fract·ing, re·fracts 1. To deflect (light, for example) from a straight path by refraction. 2. (focused) by special materials such as Ca[F.sub.2] and Ba[F.sub.2]. However, the index of refraction Index of refraction A constant number for any material for any given color of light that is an indicator of the degree of the bending of the light caused by that material. Mentioned in: Eye Glasses and Contact Lenses of these materials varies rapidly with wavelength, requiring precise determination of the lasers' actual spectral lines for engineering purposes. Scientists at NIST have performed very accurate measurements (uncertainties of [+ or -] 0.0001 nm) of six wavelengths of a molecular fluorine laser of the type to be used for production of integrated circuits. Three of the lines were newly observed. They used the NIST 10 m vacuum spectrometer to record the spectra, which were calibrated by spectral lines from a platinum hollow cathode lamp A hollow cathode lamp (HCL) is type of lamp used in physics and chemistry as a spectral line source and as a frequency tuner for light sources such as lasers. An HCL usually consists of a glass tube containing a cathode made of the material of interest, an anode, and a . Accurate wavelengths for this lamp had been determined previously for the calibration requirements of the Hubble Space Telescope Hubble Space Telescope (HST), the first large optical orbiting observatory. Built from 1978 to 1990 at a cost of $1.5 billion, the HST (named for astronomer E. P. Hubble) was expected to provide the clearest view yet obtained of the universe. and included among the Physical Reference Data on a NIST website. CONTACT: Joseph Reader, (301) 975-3222; joseph.reader@nist.gov. |
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