Corning Tropel Product Enables Technology Innovation for Next-Generation Semiconductor Manufacturing.Business Editors/High-Tech Writers FAIRPORT, N.Y.--(BUSINESS WIRE)--Feb. 24, 2004 Tropel(R) AquaCAT(TM) Micro-objective Design Extends 193 nm Performance, Accelerates Semiconductor Manufacturing Improvements Corning Tropel, a wholly owned subsidiary Wholly Owned Subsidiary A subsidiary whose parent company owns 100% of its common stock. Notes: In other words, the parent company owns the company outright and there are no minority owners. of Corning Incorporated Corning Incorporated NYSE: GLW is an American manufacturer of glass, ceramics and related materials, primarily for industrial and scientific applications. The company was known until 1989 as Corning Glass Works. (NYSE NYSE See: New York Stock Exchange : GLW GLW Glasgow Airport (UK) GLW Gross Laden Weight GLW Good Lady Wife (Australia) ), has announced commercial availability of the Tropel(R) AquaCAT(TM) immersion micro-objective. This new lens assembly enables semiconductor manufacturers to further reduce line widths, and extend the capabilities of 193 nanometer wavelength chip fabrication fabrication (fab´rikā´sh  n),n the construction or making of a restoration. technologies - the emerging standard for advanced microchip production. The combined improvements in time to market and output from application of the AquaCAT design to semiconductor manufacturing can be expected to extend the capabilities of 193 nm technologies and extend their useful life well beyond the industry's original expectations. Producers of semiconductor manufacturing tools can spend much less money and time by incorporating the standardized AquaCAT micro-objective than if they were to have a micro-objective custom designed for each new tool they develop. In a Rochester Institute of Technology (RIT RIT, n See therapy, regenerative injection. ) laboratory, site of the new product's first installation, an AquaCAT micro-objective recently yielded image resolution of less than 100 nm. This is compared to resolution of approximately 130 nm found in circuitry of advanced microchips being manufactured today. "This is a significant evolutionary development," said John Bruning, president and CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board. of Corning Tropel. "Semiconductor manufacturers can expect to see strong performance improvements and shorter time to market with those microchips. Ultimately, these benefits can flow through to end users of microchip-based products." The AquaCAT design is based on Corning Tropel's MicroCAT(R) catadioptric cat·a·di·op·tric adj. Of or relating to an optical system that uses both reflective and refractive optical devices. catadioptric micro-objective design, but applies immersion technology to increase the objective's numerical aperture and depth of focus and, consequently, yields higher resolution. In immersion lithography, images are projected through a thin layer of highly purified water that lies between the micro-objective and the silicon wafer. RIT is applying Corning Tropel's AquaCAT micro-objective design in combination with an Exitech stepper step·per n. 1. One that steps, especially in a fast or spirited manner. 2. Informal A dancer. Noun 1. - a tool used in production of integrated circuits - to research and improve fluids used in immersion lithography. "The AquaCAT lens has allowed for acceleration of the development efforts in 193 nm water immersion lithography," said Bruce W. Smith, Ph.D., of RIT. "This has been critically important as the technology is being identified as the best candidate for next generation device applications. The collaborative engineering efforts between RIT, Corning Tropel, and Exitech have resulted in a very useful system." Through the combined expertise of its Corning Semiconductor Optics business units, Corning is a leading supplier of optical materials, precision optics, and metrology instruments for the semiconductor industry. More information is available at www.corning.com/semiconductormaterials. About Corning Incorporated Corning Incorporated (www.corning.com) is a diversified technology company that concentrates its efforts on high-impact growth opportunities. Corning combines its expertise in specialty glass, ceramic materials, polymers and the manipulation of the properties of light, with strong process and manufacturing capabilities to develop, engineer and commercialize significant innovative products for the telecommunications, flat panel display A thin display screen for computer and TV usage. The first flat panels appeared on laptop computers in the mid-1980s, and the LCD technology became the standard. Stand-alone LCD screens became available for desktop computers in the mid-1990s and exceeded sales of CRTs for the first time , environmental, semiconductor, and life sciences industries. |
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