Cluster Processing Tool Developed for High Volume ECD Copper Processing Semitool Unveils Its Most Advanced ECD Cluster System.

Business/Hi-Tech Editors

SEMICON West 2000 (Booth No. 1726)

KALISPELL, Mont.--(BUSINESS WIRE)--July 10, 2000

Semitool, Inc. (Nasdaq:SMTL), a leading supplier of wafer surface preparation and electrochemical deposition (ECD) systems, today introduced the Paragon(TM), a new family of copper ECD tools for high volume processing. The Paragon represents the culmination of nearly seven years of R&D.

With its integrated functions (metrology, ECD seed layer, ECD fill, clean, bevel etch and anneal), the Paragon is a flexible, configurable high volume and small footprint, cluster tool for semiconductor copper interconnect deposition.

To widen the ECD process window and enhance the integrated capabilities of the Paragon, Semitool is teaming with Philips Analytical Inc, a unit of Royal Philips Electronics (NYSE:PHG), to incorporate on-board metrology. The Philips' integrated optoacoustic metrology is designed to inspect the quality of the incoming copper seed layer and the ECD layer, enabling the Paragon to adjust the ECD process for better results.

"Imagine," stated Dr. Jurek Koziol, Semitool's VP of Electrochemical Technology, "a tool capable of automatic, in-situ detection and correction of incoming seed layer non-uniformities. Imagine, also, a high throughput tool that actively self-tunes to produce consistent results -- a tool that instantaneously readjusts to provide a different plating pattern for a specific wafer. The Paragon," continued Dr. Koziol, "is turning these visions into a reality, combining process versatility with expandability of modular and robust design."

The integration of multiple processes into one compact tool allows flexibility in sequencing process steps while maintaining high throughput. The control strategy of the Paragon employs the on-board analytical capability to measure the incoming seed layer and to define the required processing conditions. The Paragon selects or modifies a recipe to improve plating results, based on metrology, then runs electrochemical deposition, followed by clean, etch and anneal to stabilize the copper structure prior to CMP.

The Paragon will be displayed at Semitool's booth No. 1726, South Hall, Moscone Center at SEMICON West, July 10-12 in San Francisco.

For more information on Semitool, Inc. via facsimile at no cost, simply dial 800/PRO-INFO (800/776-4636) and enter the company ticker symbol, SMTL, or visit Semitool's web site at www.semitool.com.

About Semitool, Inc.

Semitool is a worldwide leader in the design, development, manufacture, and support of high performance wet chemical processing equipment for use in the fabrication of semiconductor devices. Its primary families of tools include ECD systems for the plating of copper interconnects for integrated circuits and other metals for various applications, and wafer surface preparation systems for cleaning, stripping, and etching processes.

Founded in 1979 and headquartered in Kalispell, Montana, Semitool maintains sales and support centers in the United States, Europe and Asia. The Company's stock trades on the Nasdaq National Market under the symbol SMTL.

Safe Harbor Statement

Except for historical information, the matters discussed in this news release include forward-looking statements, including statements relating to the acceptance, use and benefits of the Paragon. Such forward-looking statements are subject to certain risks and uncertainties that could cause actual results to materially differ from those projected. These risks include the risk that the expected acceptance, use and benefits of the Paragon will not be realized, as well as the risk that future competing technologies will render this tool and related technology obsolete. For the discussions of the risk factors related to our business, see the risk factors contained in the Company's Annual Report on Form 10-K for the fiscal year ended September 30, 1999 and other filings with the Securities and Exchange Commission. The Company assumes no obligation to update or supplement forward-looking statements that become untrue because of subsequent events.

For more information on Semitool, Inc. via facsimile at no cost, simply dial 800/PRO-INFO (800/776-4636) and enter the company ticker symbol, SMTL, or visit Semitool's web site at www.semitool.com.

Paragon is a trademark of Semitool, Inc.