Chipworks First Inside Low-K Dielectric Technology, Confirming Leadership Position in Field of Reverse Engineering Services.

Business Editors/High-Tech Writers

SEMICON Japan 2003

Booth #: 5-B402

TOKYO--(BUSINESS WIRE)--Dec. 3, 2003

Chipworks Inc. ("Chipworks"), the standard setting supplier of reverse engineering services, confirms that samples they have examined of ATI's RADEON 9600 XT visual processor, fabricated by TSMC is using a true low-k dielectric process. Chipworks confirms that the low-k in this part is Applied Materials (AMAT) 'Black Diamond' material.

In September 2003, ATI announced the RADEON 9600XT. Billed as the world's first visual processor developed using a low-k dielectric process, it features four pixel pipes and 128MB of graphics memory and claims to delivers unrivalled performance. Leading edge performance requires leading edge process technology, and for the past few years integration of true low-k dielectrics has been a major goal in boosting interconnect performance on an integrated circuit (IC). Initially forecast but not seen at the 180 nm node, low-k was expected to be part of the 130 nm ramp-up. However, because of process integration and reliability problems, most 130 nm processes went into production using fluorinated glass (FSG). TSMC has offered their 130 nm process with both FSG and low-k options, but began ramping the low-k just this quarter (Q4, 2003).

According to Dick James, Chipworks' senior technology analyst, "Chipworks has been trying to obtain true low-k parts for over a year, but each time we analyzed a leading edge chip, we found FSG in there. This is the first chip that Chipworks has seen with significant structural changes that indicate the use of a 'true low-k' dielectric. By 'true low-k', we mean a layer with a dielectric constant of 3.0 or lower."

Preliminary analysis shows that the part is manufactured in a 130nm process, with eight levels of copper. The low-k material is used to isolate the lower six levels, and FSG for the top two metal layers. Also, the dual damascene structure is different from the FSG process. There is no etch-stop layer and the vias have a multi-stepped structure. Chipworks is continuing the analysis to fully characterize the leading edge processing of this device.

There will be challenges in the analysis because low-k structures are inherently more fragile. A major reason for the delay in introduction of true low-k into the market has been the difficulty in packaging these devices due to this increased fragility. We have already seen some delamination in the cross sections we have produced so far." confirmed James.

"Chipworks is always looking for the latest and greatest semiconductor technology, either through our international network of suppliers or by purchasing strategic downstream consumer products. Being the first identified true low k device, the ATI RADEON 9600 XT project will provide engineers the opportunity to look inside this latest technology node." stated Chipworks president, Julia Elvidge.

TSMC's 130 nm process, the first production line process with successfully integrated low-k dielectrics, will be presented in greater detail in an upcoming structural analysis report. Chipworks structural analysis reports deliver an objective analysis of 'what's inside technology' of leading-edge semiconductor devices.

About Chipworks

Chipworks is an internationally recognized technical services company that analyzes the circuitry and physical composition of semiconductor chips and electronics systems for applications in patent licensing support and competitive study. Chipworks' technical experts use sophisticated lab facilities and a rich library of in-house semiconductor data and expertise to conduct detailed analyses of a wide selection of chip types. Chipworks develops high value, meticulously researched, on-time reports presented in a format that is easy to understand and tailored to customer needs.

Since 1992, Chipworks has successfully helped semiconductor and electronics organizations achieve their goals by supporting research and development efforts and patent portfolio management. Headquartered in Ottawa, Canada, the Company has offices worldwide. Chipworks can be visited via the Internet at www.chipworks.com