Chipworks Adds Scanning Capacitance Microscopy to its Capabilities Providing Results Never Before Realized by Traditional Analysis.Business Editors OTTAWA, Canada--(BUSINESS WIRE)--Jan. 29, 2004 Chipworks Inc. ("Chipworks"), the standard setting supplier of reverse engineering services, announced today that they have added Scanning Capacitance Microscopy Scanning capacitance microscopy (SCM) is a variety of scanning probe microscopy in which a narrow probe electrode is held just above the surface of a sample and scanned across the sample. (SCM (1) (Software Configuration Management, Source Code Management) See configuration management. (2) See supply chain management. ) to their in-house capabilities increasing the accuracy of semiconductor well and junction measurements. Traditional Scanning Electron Microscope scan·ning electron microscope n. Abbr. SEM An electron microscope that forms a three-dimensional image on a cathode-ray tube by moving a beam of focused electrons across an object and reading both the electrons scattered by the object and (SEM) imaging has difficulty distinguishing between wells and substrates, particularly in the case of similarly doped wells and substrates, such as a P well in a P type wafer. The SCM can image doping doping, in electronics: see semiconductor. Altering the electrical conductivity of a semiconductor material, such as silicon, by chemically combining it with foreign elements. concentrations allowing the user to see these difficult to view features. "We're focusing on strengthening our process analysis capabilities to complement the outstanding work achieved from our circuit and system analysis initiatives. Process and structural analysis focuses on the physical structure and chemical make-up of semiconductor chips and microelectronic assemblies, and is one of the fastest growing business divisions for Chipworks. Semiconductor and electronics organizations use this service to support research and development efforts for their own products." said Chipworks president Julia Elvidge. According to Chipworks senior technology analyst Dick James "What makes the SCM significant is that it is increasingly difficult to accurately reveal semiconductor well profiles and junctions as well as measure carrier concentrations. Up to now we have been able to use lower resolution techniques such as Spreading Resistance Profiling (SRP SRP - A data link layer protocol. ) and Secondary Ion Mass Spectrometry You can assist by [ editing it] now. (SIMS). However these are now incapable of coping with the micro-minuscule dimensions of today's state-of-the-art devices. The SCM has an ultimate resolution of less than 20 nanometers, so this is a significant enhancement to our existing analytical capabilities. It is particularly useful in showing features such as the photodiode A light sensor (photodetector) that allows current to flow in one direction from one side to the other when it absorbs photons (light). The more light, the more the current. Used to detect light pulses in optical fibers and other light-sensitive applications, it works the opposite of a structure in CMOS (Complementary Metal Oxide Semiconductor) Pronounced "c-moss." The most widely used integrated circuit design. It is found in almost every electronic product from handheld devices to mainframes. imagers." An SCM is a version of an Atomic Force Microscope atomic force microscope (AFM), device that uses a spring-mounted probe to image individual atoms on the surface of a material. Unlike the scanning tunneling microscope, which is also a scanning probe microscope, the AFM can be used on materials that do not conduct (AFM (Atomic Force Microscope) A device used to image materials at the atomic level. AFMs are used to solve processing and materials problems in electronics, telecom, biology and other high-tech industries. ) with an additional module that measures the electronic capacitance of a sample, which is related to the sample doping structure. The SCM can also be used in its AFM mode, which provides the user with detailed surface profiles of the sample, as an additional useful sample imaging technique. "Our capabilities have also improved significantly with the addition last year of our Transmission Electron Microscope (TEM TEM 1. transmission electron microscope. 2. triethylenemelamine. 3. transmissible encephalopathy of mink. ). This tool allows us to perform atomic-scale imaging which is required for the measurement of the thinnest features such as gate oxide thickness and barrier layer metalization." confirmed James. "Chipworks is the premier source of what's inside technology through creative investigation and analysis. We have a very strong reputation in the semiconductor and electronics industry. With the addition of the SCM, TEM and the recent lab facility expansion at our corporate headquarters, not only will we be able to cope with larger volumes of increasingly complex samples, we can now more accurately measure semiconductor wells and junctions." commented Julia Elvidge. About Chipworks Chipworks is an internationally recognized technical services company that analyzes the circuitry and physical composition of semiconductor chips and electronics systems for applications in patent licensing support and competitive study. Chipworks' technical experts use sophisticated lab facilities and a rich library of in-house semiconductor data and expertise to conduct detailed analyses of a wide selection of chip types. Chipworks develops high value, meticulously researched, on-time reports presented in a format that is easy to understand and tailored to customer needs. Since 1992, Chipworks has successfully helped semiconductor and electronics organizations achieve their goals by supporting research and development efforts and patent portfolio management. Headquartered in Ottawa, Canada, the Company has offices worldwide. Chipworks can be visited via the Internet at www.chipworks.com |
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