Characterization and Metrology for ULSI Technology: Proceedings. (CD-ROM included).0735402779 Characterization and metrology for ULSI technology; proceedings. (CD-ROM CD-ROM: see compact disc. CD-ROM in full compact disc read-only memory Type of computer storage medium that is read optically (e.g., by a laser). included) International Conference on Characterization and Metrology for ULSI Technology (2005: Richardson, TX) Ed. by David G. Seiler et al. American Institute of Physics The American Institute of Physics (AIP) is a professional body representing American physicists and publishing physics related journals. It was founded in 1931. The aims of the organization are: "promoting the advancement and diffusion of the knowledge of physics and its 2005 667 pages $245.00 Hardcover AIP AIP acute intermittent porphyria. AIP Acute intermittent porphyria conference proceedings; v.788 TK7874 This volume presents the proceedings of the March 2005 International Conference on Characerization and Metrology for ULSI [ultra large scale integrated] Technology, the fifth in a series of conferences devoted solely to silicon semiconductor characterization and metrology. The conference brought together engineers, scientists, and industry leaders concerned with all aspects of the technology, characterization techniques, and metrology for silicon research (including development, manufacturing, and diagnostics). The editors (alternately affiliated with the National Institute of Standards and Technology National Institute of Standards and Technology, governmental agency within the U.S. Dept. of Commerce with the mission of "working with industry to develop and apply technology, measurements, and standards" in the national interest. ; SEMATECH SEMATECH Semiconductor Manufacturing Technology , Metara, Inc.; Intel; the National Science Foundation; and Freescale Semiconductor, Inc.) organize the 105 peer-reviewed papers in accordance with the conference programming, grouping the contributions under the topic headings of plenary; front end--gate stack; front end--transistor channel, junctions, and contacts; critical metrology techniques; lithography--overlay metrology; lithography--mask metrology; interconnect/low-K; scanning electron microscopy; transmission electron microscopy “TEM” redirects here. For other uses, see TEM (disambiguation). Transmission electron microscopy (TEM) is an imaging technique whereby a beam of electrons is transmitted through a specimen, then an image is formed, magnified and directed to appear either ; critical analytical techniques; and the future. The accompanying CD-ROM contains electronic versions of all the papers. ([c] 2005 Book News, Inc., Portland, OR) |
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