Cascade Microtech and Micron Force Instruments to Jointly Develop a New Generation of IC Probing Product.

SAN JOSE, Calif.--(BUSINESS WIRE)--July 13, 1998--Cascade Microtech Inc. and Micron Force Instruments (MFI) announced today a cooperative agreement to jointly develop a new generation of IC probing technology.

The new technology will be aimed at the semiconductor failure analysis and yield management markets and will address the challenges that shrinking process geometries pose to physical design and failure analysis of complex ICs.

The initial product from the joint efforts will be a contact probe/positioner for use on a new wafer probe station, optimized for sub-micron probing. Products will also be available to extend the capabilities of Cascade's highly successful Alessi and Summit analytical probe stations. To achieve the required performance the probe station will use an innovative Atomic Force Microscopy (AFM) approach pioneered by MFI. This approach allows nanometer imaging of IC features and the precise control of probes.

David Fisher, president and CEO of MFI, commented, "We are very pleased to have the opportunity to work with Cascade Microtech, the world leader in on-wafer characterization. As IC features shrink below .25 micron, optical positioning of probes becomes problematic. Our joint efforts will allow the introduction of new probing solutions to match the needs created by process shrinks below .25 micron."

By extending the limits of internal node probing, the new probe station addresses key concerns outlined in the SIA semiconductor technology roadmap, an industry publication which forecasts semiconductor technology trends and challenges.

"Throughout our history Cascade has been a technology leader. We view our investment in MFI as a continuation of our commitment to successfully bring unique and essential new probing technologies to market," stated Eric Strid, CEO of Cascade Microtech. "The combination of our probe and measurement expertise with MFI's AFM based positioning capability will provide an enabling solution for our customer's next generation analytical probing requirements."

Based in Beaverton, Ore., Cascade Microtech Inc. is the world leader in advanced microelectronic probing solutions. Cascade manufactures a comprehensive line of probe stations, probe cards, accessories and software, used to characterize semiconductor devices on wafer. Cascade's web site is www.cmicro.com. For more information, please contact David Quane, Product Marketing Manager at 503/643-7779 or [e-mail].

Micron Force Instruments Inc. (MFI), based in San Jose, Calif., is a venture start-up based on the commercialization of unique internal node IC probing technologies.

In addition to the nano-positioning capability of the joint MFI/Cascade Microtech product, MFI will introduce a line of non-contact Electro Force Sampling (EFS) probes that provide sub-micron positioning and high speed waveform capture with negligible loading to the DUT (device under test). For more information, please contact Rich Wiley, V.P. Marketing at 408/501-0793 or [e-mail].

    CONTACT:  Cascade Microtech
               David Quane, 503/643-7779
               [e-mail].
               or
               Micron Force Instruments
               Rich Wiley, 408/501-0793
               [e-mail].
               or
               Kirkpatrick Communications
               Bruce Kirkpatrick, 510/651-9229
               [e-mail].