CMOS-MEMS.TK7875 3-527-31080-0 CMOS-MEMS. Title main entry. Ed. by O. Brand and G. K. Fedder. (Advanced micro & nanosystems; v.2) Wiley-VCH, [c]2005 594 p. $250.00 Advances in research in CMOS-integrated microelectromechancial systems is still producing advances at a dizzying pace, and the editors and contributors here not only acknowledge past achievements but present current challenges and future prospects. The papers range from new tools and techniques in fabrication fabrication (fab´rikā´sh  n),n the construction or making of a restoration. technology to material characterization. They include applications in such areas as monolithically integrated inertial sensors, CMOS-MEMS acoustic devices, RF CMOS (Complementary Metal Oxide Semiconductor) Pronounced "c-moss." The most widely used integrated circuit design. It is found in almost every electronic product from handheld devices to mainframes. MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. , CMOS-based pressure, thermal and chemical sensors, biometric capacitive CMOS fingerprint fingerprint, an impression of the underside of the end of a finger or thumb, used for identification because the arrangement of ridges in any fingerprint is thought to be unique and permanent with each person (no two persons having the same prints have ever been sensor systems, and CMOS-based biochemical sensing systems. The volume closes with information on circuit and system integration. |
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