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Brooks Automation Unveils a New Line-up of Vacuum Robot Solutions to Meet a Broad Range of Semiconductor Wafer Handling Requirements for 200Mm and 300Mm Process Applications.


CHELMSFORD, Mass.--(BUSINESS WIRE)--July 13, 1998--

6 Combining the Latest in Robot Technologies With the Modular, Field-proven Magnatran 7 Robot Design, Brooks Continues to Expand Its

Range of Cost-effective Vacuum Robot Solutions for a Variety of Semiconductor Process Tool Applications and Architectures

Brooks Automation, Inc. (NASDAQ NASDAQ
 in full National Association of Securities Dealers Automated Quotations

U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on
:BRKS BRKS Brooks (street suffix) ) ("Brooks" or the "Company"), a leading supplier of automation systems and equipment control solutions for the semiconductor and flat panel display A thin display screen for computer and TV usage. The first flat panels appeared on laptop computers in the mid-1980s, and the LCD technology became the standard. Stand-alone LCD screens became available for desktop computers in the mid-1990s and exceeded sales of CRTs for the first time  process equipment industries, announces the unveiling of a new line-up of vacuum robot solutions to meet an expanding range of 200mm and 300mm semiconductor wafer handling requirements. Utilizing the latest robot technologies and unique modular design In the context of systems engineering, modular design — or "modularity in design" — is an approach aiming to subdivide a system into smaller parts (modules) that can be independently created and then used in different systems to drive multiple functionalities.  of the MagnaTranTM 7, Brooks introduces the first in a series of robot options for incorporation into new process tool designs, or retrofits to existing in-fab tools. The broad selection of MagnaTran 7 configurations has been enhanced to include a Sensor Bus interface, Long Z-Stroke, a cost-effective 2-axis (radial and rotation without vertical Z motion) configuration, and enhanced safety features including the Power PakTM battery back-up module and enhanced user-customizable interlocks. MagnaTran 7 robots are designed for use within Brooks and other OEM (Original Equipment Manufacturer) The rebranding of equipment and selling it. The term initially referred to the company that made the products (the "original" manufacturer), but eventually became widely used to refer to the organization that buys the products and  cluster tool platforms.

"We continue to maintain our leadership position in the industry by providing our customers with the cost-effective automation solutions they need, when they need them," said Jim Jenson, Senior Product Manager, Brooks Automation. With the innovative, modular design of the MagnaTran 7, we've been able to achieve shorter development, manufacturing, and test cycles for new capabilities based on field-proven components. This has enabled us to deliver highly-reliable, cost-effective solutions to our customers faster than ever before."

"The key to our success is providing flexibility. The new options available for the MagnaTran 7 give our customers the design, architecture, and cost flexibility they did not have before. Presented with more choices in robot capabilities and configurations, equipment manufacturers now have the opportunity to consider innovative approaches to tool architectures that were not previously possible."

The following options are the first in a series of new capabilities being introduced for the MagnaTran 7.

Leading the way in providing Sensor Bus interfaces for vacuum robots, Brooks has already shipped a robot with LONWorksTM interface, and has plans to release other Sensor Bus interfaces, such as DeviceNetTM as well. The same command set utilized for RS-232 serial or digital parallel I/O The introduction to this article provides insufficient context for those unfamiliar with the subject matter.
Please help [ improve the introduction] to meet Wikipedia's layout standards. You can discuss the issue on the talk page.
 for discrete control, is now available for use with a distributed Sensor Bus control network. Sensor Bus is primarily targeted at 300mm tool applications due to the opportunity for new tool designs.

A new Long Z-Stroke option is now available for the MagnaTran 7. The Long Z-Stroke motion is useful for maximizing throughput for applications where wafers are delivered to multiple levels in a cluster tool, such as to a single process module with multiple levels, or to a vertical stack of process modules. Instead of incorporating the Z-motion into a process module, equipment manufacturers can save costs and reduce the complexity of the module by utilizing a robot with a long Z-motion. The Long Z-Stroke gives OEMs significant design flexibility for their new tools.

A 2-axis (radial and rotation, without vertical Z-motion) version is available for applications where Z-motion is not required -- such as for process tools which already have a sufficient Z-motion capability in substrate pick and place locations. The 2-axis version offers a more cost-effective solution for this type of application.

For added operational safety and wafer preservation during temporary power outages This is a list of famous wide-scale power outages. 1965
  • The Northeast Blackout of 1965 on November 9, 1965.
1977
  • The infamous New York City Blackout of July 13-14, 1977, resulted in looting and rioting.
, Brooks offers the Power PakTM and intelligent interlocking interlocking /in·ter·lock·ing/ (-lok´ing) closely joined, as by hooks or dovetails; locking into one another.
interlocking Obstetrics A rare complication of vaginal delivery of twins; the 1st
 capabilities. The Power Pak is a battery back-up module which ensures a safe, controlled motion stop after power loss or EMO actuation to prevent wafer damage. It saves space by attaching directly to the robot drive. An intelligent interlocking capability enables the user to provide for enhanced safety during equipment servicing (e.g., when the lid of the transport chamber is open, the robot will remain powered on, but will not operate). Intelligent interlocks are predefined at the factory and can be supplemented by the user on-site for all robot configurations to meet in-house safety requirements.

The MagnaTran 7 robot has already been proven to increase throughput performances by up to 60% for PVD PVD
abbr.
peripheral vascular disease


PVD Peripheral vascular disease, see there
, CVD CVD Cardiovascular disease, see there , Etch, RTP (1) (Rapid Transport Protocol) The protocol used in IBM's High Performance Routing (HPR) system.

(2) (Realtime Transport Protocol) An IP protocol that supports real time transmission of voice and video.
, Clean, and Ash cluster tools using Brooks platforms. It has also set a benchmark standard in vacuum robot reliability, passing the 10 million cycle MCBF MCBF Mean Cycles Between Failure
MCBF Multnomah County Bike Fair (Portland, Oregon)
MCBF Mean Countdown Between Failures
MCBF Most Critical Buffer First
MCBF Mean Cycle Between Failure
 mark -- an improvement 4X greater than previous generation robots. "We're seeing that the MagnaTran 7 is consistently exceeding the expectations of our most demanding customers for productivity and reliability," observed Jenson.

Brooks Automation, Inc. is an independent supplier of substrate material handling robots, modules, software controls and fully integrated cluster tool platforms to semiconductor, flat panel display and data storage manufacturers worldwide. Founded in 1978, the Company has distinguished itself as a technology and market leader, particularly in the demanding cluster tool vacuum-processing environment. By working with and focusing on increasing the productivity of our customers' device fabrication fabrication (fab´rikā´shn),
n the construction or making of a restoration.
 equipment, the Company has been able to set and constantly upgrade industry substrate material handling, thermal conditioning and software controls standards. In addition to corporate facilities in Chelmsford, Massachusetts Chelmsford is a town in Middlesex County, Massachusetts in the Greater Boston area. It is located 24 miles from Boston and, bordering on the City of Lowell, it is part of the Greater Lowell metropolitan area. , Brooks Automation maintains a software technology center in Richmond, British Columbia This page is for the city of Richmond, British Columbia. For the federal electoral district in this locality see Richmond (electoral district); for the provincial electoral district see Richmond (provincial electoral district).  as well as sales and service offices located in the United States, Europe, Japan, Korea and Taiwan. For further information on Brooks Automation, Inc., see their Web site at: www.brooks.com.

MagnaTran is a trademark of Brooks Automation, Inc. LONWorks is a trademark of Echelon. DeviceNet is a trademark of ODVA (Open DeviceNet Vendors Association) See DeviceNet. .

    CONTACT:  MARKETING:
               Michael Pippins
               Brooks Automation, Inc.
               978/262-2607
               mpippins@brooks.com
                    or
               PR:
               Carol Collins
               Brooks Automation, Inc.
               978/262-2602
               ccollins@brooks.com
                    or
               INVESTOR RELATIONS:
               Van Negris/Philip J. Denning
               Kehoe, White, Savage & Co., Inc.
               212/396-0606


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No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 1998, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Article Type:Article
Geographic Code:1USA
Date:Jul 13, 1998
Words:953
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