Brooks Automation Receives Multi-Million Dollar Order for Patterns, the Leading Fault Detection and Process Monitoring Solution.

Business/Technology Editors

CHELMSFORD, Mass.--(BUSINESS WIRE)--Jan. 10, 2001

Patterns is the only proven solution available that provides

advanced fault detection and classification, excursion

protection, and process monitoring capabilities.

Brooks Automation, Inc. (NASDAQ: BRKS), a leader in tool and factory automation solutions for the global semiconductor industry, today announced that it has received a multi-million dollar repeat order for Patterns(TM), its leading solution for fault detection, classification and process monitoring. The most recent order for Patterns, from a top U.S. semiconductor supplier, puts the number of Patterns installations in production at more than 1200 worldwide.

Patterns is a component of APCLink(TM), Brooks' new standards-compliant SEMI Framework Automated Process Control solution. In addition to fault detection and process monitoring, APCLink provides run-to-run control (R2R(TM)) and statistical process control (SPC) capabilities.

"As process windows tighten, fault detection and process control are emerging as critical technologies," said Jim Pelusi, Senior Vice President, Brooks Automation, Inc. "Patterns provides real-time, in-situ fault classification and process monitoring in addition to fault detection. This enables engineers to detect and classify process and equipment excursions before problems impact production."

Patterns 4.2, released January 2001, provides real-time visibility into faults both inside the fab and at the desktop. Engineers can monitor multiple tools simultaneously and compare the performance of tools. Patterns 4.2 is integrated with STATIONworks(TM), Brooks' equipment automation solution; however, Patterns can also be integrated with most equipment automation solutions through a standards-based COM API.

Brooks Automation, Inc.

Brooks Automation, Inc. is a leading supplier of integrated automation solutions for the global semiconductor, data storage, and flat panel display manufacturing industries. As an established market leader in hardware and software automation, Brooks continues to pioneer best-in-class technologies that outperform their competitors--from vacuum and atmospheric robots, cluster tool platforms and modules, ultra clean mini-environments for isolating processing equipment and wafers--to factory and tool automation software and integration services. Both OEM and fab customers leverage Brooks Automation products and services to optimize total fab performance in dynamic manufacturing environments. The Company has ISO 9001 certification, is headquartered in Chelmsford, MA and has direct operations in the United States, Canada, Europe, Japan, Korea, Taiwan, and Singapore. Brooks' web site is www.brooks.com.

"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995:

The foregoing discussion contains forward-looking statements related to future financial results. These statements involve known and unknown risks and uncertainties including, without limitation, risks relating to the Company's development and marketing of Patterns(TM), the Company's dependence on the cyclical semiconductor industry, the Company's dependence on relatively few customers for a significant portion of its revenues, the Company's reliance on sales to OEM customers and the lengthy sales cycles of those customers, the ability of the Company to continue to successfully develop and market new products and product enhancements on a timely basis, the ability to integrate recent acquisitions into the Company, the highly competitive nature and rapid technological change that characterize the industries in which the Company competes, and other risks and uncertainties described in the Company's reports and registration statements filed with the Securities and Exchange Commission. As a result, there can be no assurance that the Company's future results will not be materially different than those projected. The Company also operates in an industry sector where securities' values are highly volatile and may be influenced by economic and other factors beyond the Company's control. The forward-looking statements contained herein speak only of the Company's expectations as of the date of this press release. The Company expressly disclaims any obligation or undertaking to release publicly any updates or revisions to any such statement to reflect any change in the Company's expectations or any change in events, conditions or circumstances on which any such statement is based.