Brooks Automation Inc. Acquires MITEX Solutions; Leader in Run-to-Run Control Enhances Brooks' Process Control Solutions.

Business/Technology Editors

CHELMSFORD, Mass.--(BUSINESS WIRE)--July 6, 2000

Brooks Automation, Inc. (NASDAQ:BRKS) today announced the acquisition of substantially all assets of MiTeX Solutions (MiTeX), a leader in run-to-run (R2R(TM)) control. MiTeX's products will be key components of Brooks' integrated Advanced Process Control (APC) strategy. The acquisition was structured as a purchase of substantially all MiTeX's assets for a combination of cash, Brooks' common stock and future incentives.

Robert J. Therrien, President and CEO of Brooks Automation, said, "MiTeX is the world leader in run-to-run control. Bringing MiTeX into the growing Brooks family of integrated automation solutions is another important step in our strategy of acquisition and internal investment to deliver best-in-class factory and tool automation solutions. I believe that MiTeX's widely accepted R2R technology, coupled with Brooks' broad technology portfolio and professional services, will provide APC solutions that enable our customers to maintain stable and efficient manufacturing in today's rapidly changing semiconductor processes. Brooks' approach of providing open, scalable, and integrated automation solutions makes the two companies a natural fit. The ability to scale our complete APC solution to meet the needs of both Semiconductor Manufacturers and Semiconductor Capital Equipment suppliers is unique in the market-place."

James Moyne, President and CEO of MiTeX, said, "Beyond acquiring MiTeX's patented technology in R2R controllers and a SEMATECH APC-compliant framework software for implementing these solutions, Brooks Automation has the essential components to deploy a comprehensive fab-ready(TM) APC solution. Only Brooks Automation can offer a comprehensive APC solution that includes the key elements: a SEMATECH compliant APC Framework with plug-ins for integrated R2R control, fault detection and classification (FDC), and statistical process control (SPC), as well as the required integration to equipment and MES solutions. Our experience has shown us that key success factors in deploying APC solutions are standards compliance, seamless integration with both the manufacturing execution systems (MES) and the control system of the process tools, and skilled professional services capable of customizing the solution for each customer's specific business practices. Brooks Automation maintains a leadership position in all of these areas."

R2R has been identified by the Semiconductor Industry Association and I300I as a key technology for competitiveness in advanced 200mm facilities and as a required component of 300mm facilities, providing tighter control of uniformity across the wafer, increased process capability, reduced scrap, reduced need for non-product wafers and test wafers, reduced equipment down-time, and increased process yield. R2R is the only form of APC that has proven effective in all of these areas.

Brooks Automation, Inc.

Brooks Automation, Inc. is a leading supplier of integrated automation solutions for the global semiconductor, data storage, and flat panel display manufacturing industries. As an established market leader in hardware and software automation, Brooks continues to pioneer "Best-in-Class" technologies that outperform their competitors - from vacuum and atmospheric robots, cluster tool platforms and modules, ultra clean mini-environments for isolating processing equipment and wafers - to factory and tool automation software and integration services. Both OEM and fab customers leverage Brooks Automation products and services to optimize total fab performance in dynamic manufacturing environments. The Company has ISO 9001 certification, is headquartered in Chelmsford, MA and has direct operations in the United States, Canada, Europe, Japan, Korea, Taiwan, and Singapore. Brooks' web site is www.brooks.com.

"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995:

The foregoing discussion contains forward-looking statements related to future financial results. These statements involve known and unknown risks and uncertainties including, without limitation, risks relating to the Company's dependence on the cyclical semiconductor industry, the Company's dependence on relatively few customers for a significant portion of its revenues, the Company's reliance on sales to OEM customers and the lengthy sales cycles of those customers, the ability of the Company to continue to successfully develop and market new products and product enhancements on a timely basis, the ability to integrate recent acquisitions into the Company, the highly competitive nature and rapid technological change that characterize the industries in which the Company competes, and other risks and uncertainties described in the Company's reports and registration statements filed with the Securities and Exchange Commission. As a result, there can be no assurance that the Company's future results will not be materially different than those projected. The Company also operates in an industry sector where securities' values are highly volatile and may be influenced by economic and other factors beyond the Company's control. The forward-looking statements contained herein speak only of the Company's expectations as of the date of this press release. The Company expressly disclaims any obligation or undertaking to release publicly any updates or revisions to any such statement to reflect any change in the Company's expectations or any change in events, conditions or circumstances on which any such statement is based.