Brooks Automation, Inc. Demonstrates Leadership in 300mm and Advanced 200mm Automation at SEMICON Taiwan 2001, Booth No. 1152.

Business/Technology Editors

SEMICON Taiwan 2001

CHELMSFORD, Mass.--(BUSINESS WIRE)--Sept. 17, 2001

Brooks Automation, Inc. (Nasdaq: BRKS), a leading supplier of tool and factory hardware and software automation solutions for the global semiconductor industry, will show how its products optimize performance in 300mm and advanced 200mm fabs at SEMICON Taiwan 2001, to be held September 17-19 at the Taipei World Trade Center in Taipei, Taiwan.

Visit Brooks at Booth #1152, where Brooks representatives will be on hand to provide information and demonstrate the capabilities of a number of Brooks products, including:

--300works(TM): The 300works product combines software, best practices and professional services to deliver a complete 300mm and advanced automation solution that provides the highest level of functionality and the most rapid time to market.

--FACTORYworks(R): Manufacturing Execution System (MES) capable of the advanced requirements for 300mm and other highly automated fabs. A proven solution with a large installed base, an open, extensible architecture and a rich feature set.

--Advanced Process Control (APC) and Equipment Performance Tracking (EPT): Real-time fault detection and classification, run-to-run control, process monitoring, maintenance management and OEE (Overall Equipment Effectiveness) software that gives semiconductor companies the ability to automate and control advanced processes and detect process errors.

--CLASS MCS(TM): The only vendor-neutral real-time material control system for transporting and storing lots, reticles and other materials in semiconductor fabs.

--Advanced Productivity Family (APF): An industry-standard, integrated software suite for scheduling, planning, analysis, and reporting, and including Brooks' unique real-time dispatching solution.

--FIXLOAD(TM): The most widely accepted 300mm Load Port on the market. FIXLOAD is a cost-of-ownership oriented, easy to integrate OEM system that provides the highest speed and reliability in 300mm process tool loading.

--ERGOSPEED II(TM): Brooks' standard 200mm SMIF Load Port interface, the ERGOSPEED II ensures the highest level of cleanliness, significantly raises process tool productivity and maximizes throughput by safely loading and unloading wafer cassettes in the shortest possible time.

--MapTrak(TM) Express: A member of the Brooks family of modular wafer sorters known for their configurability, ultra-high cleanliness and maximum throughput.

"As Brooks continues to strengthen and expand its presence in the Asia market, we have an increasing number of customers in Asia who require advanced, integrated automation solutions that will support their transition from 200mm to 300mm. We intend to help these customers achieve optimal performance in their fabs, as they make a smooth transition to 300mm, by providing them with the most robust and integrated automation solutions available. Through our solutions-oriented approach, we provide customers with the most efficient means of automating their fabs, so they can get to market quickly with new product and thus sustain profitability," said Robert J. Therrien, president and chief executive officer, Brooks Automation, Inc.

Brooks Automation, Inc.

Brooks Automation, Inc. is the leading global supplier of OEM tool automation and factory management software for the semiconductor, data storage and flat panel display manufacturing industries. As an established market leader in hardware and software automation, Brooks continues to pioneer "Best-in-Class" technologies that outperform their competitors - from vacuum and atmospheric robots, cluster tool platforms and modules, ultra-clean mini-environments for isolating processing equipment and wafers - to factory and tool automation software and integration services. Both OEM and fab customers leverage Brooks Automation's products and environments. The Company has ISO 9001 certification, is headquartered in Chelmsford, MA and has direct operations in the United States, Canada, Europe, Japan, Korea, Malaysia, Singapore and Taiwan. Brooks' website is www.brooks.com.

"Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995: The foregoing discussion may contain forward-looking statements relating to the expected benefits of Brooks Automation products. These statements involve known and unknown risks and uncertainties including, without limitation, risks relating to the manner in which customers use the Company's products and integrate the products with other components, the Company's dependence on the cyclical semiconductor industry, the ability of the Company to continue to successfully develop and market new products and product enhancements on a timely basis, the Company's dependence on relatively few customers for a significant portion of its revenues, the Company's reliance on sales to OEM customers and the lengthy sales cycles of those customers, the highly competitive nature and rapid technological change that characterize the industries in which the Company competes, and other risks and uncertainties described in the Company's reports and registration statements filed with the Securities and Exchange Commission. As a result, there can be no assurance that the Company's future results will not be materially different from those projected. The forward-looking statements contained herein speak only of the Company's expectations as of the date of this press release. The Company expressly disclaims any obligation or undertaking to release publicly any updates or revisions to any such statement to reflect any change in the Company's expectations or any change in events, conditions or circumstances on which any such statement is based.