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Brion and NuFlare Join Forces to Improve Mask Equipment Technology.


A combination of Brion's model-based computational lithography and NuFlare's sophisticated mask equipment is expected to enhance the semiconductor industry's mask technology

SANTA CLARA Santa Clara, city, Cuba
Santa Clara (sän`tä klä`rä), city (1994 est. pop. 217,000), capital of Villa Clara prov., central Cuba.
, Calif. -- Brion Technologies and NuFlare Technology, Inc. today announced plans to apply their combined expertise in computational lithography and mask equipment technology to develop new designs for manufacturing technologies for next-generation semiconductor masks.

Brion's Tachyon tachyon (tăk`ēŏn'), hypothetical elementary particle that travels only at speeds exceeding that of light. According to the theory of relativity, the speed of light is the limiting velocity for all ordinary material particles. [TM] technology, which is widely used to verify and correct advanced semiconductor designs, will be used to help address the challenges of mask equipment technology at the 32 nanometers (nm) process node and beyond. The resulting products are expected to be marketed by NuFlare, one of the world's leading producers of mask writing and inspection systems.

"NuFlare appreciates the contributions that Brion is making to the industry's mask technology progress," said Kinya Usuda, director, Mask Inspection Equipment Division, at NuFlare. "This joint development effort, and ultimately our industry, will benefit from the combined strengths of these industry leaders."

"As a user of Brion's computational lithography and NuFlare's reticle ret·i·cle  
n.
A grid or pattern placed in the eyepiece of an optical instrument, used to establish scale or position.



[Latin r
 writing and inspection systems, we are pleased to support this collaborative effort," said Tatsuhiko Higashiki, senior manager, Advanced ULSI (Ultra Large Scale Integration) More than one million transistors on a chip. See SSI, MSI, LSI and VLSI.  Process Engineering Dept. II, Advanced ULSI Process Engineering Center, at Toshiba. "We expect the resulting technologies to improve the quality of masks and, ultimately, improve our own products' yields and time to market."

"We are delighted to be working with NuFlare and Toshiba on this exciting new venture," said Jim Koonmen, general manager at Brion. "Our computational lithography technology already plays a key role in enabling leading-edge integrated circuit integrated circuit (IC), electronic circuit built on a semiconductor substrate, usually one of single-crystal silicon. The circuit, often called a chip, is packaged in a hermetically sealed case or a nonhermetic plastic capsule, with leads extending from it for  manufacturing, and this partnership should accelerate the industry's ability to produce even smaller, more powerful devices."

About NuFlare Technology

NuFlare Technology, Inc. is a supplier of mask writing systems, mask inspection systems, and epitaxial reactor systems. NuFlare has the world's top market share in mask writing systems and is headquartered in Yokohama City, Kanagawa-ken, Japan.

About Brion Technologies

Brion Technologies, an ASML ASML Abstract State Machine Language
ASML Anisotropic Shielded Microstrip Line
 company, is the industry leader in computational lithography for integrated circuits. Brion's Tachyon[TM] platform, an OPC (1) (OpenGL Performance Characterization) A project group within GPC that manages OpenGL benchmarks. OPC endorses the Viewperf and GLperf benchmarks. Viewperf was created by IBM and OPC provides viewsets for it, which are combinations of tests using specific  and OPC verification system, enables capabilities that address chip design, mask making and wafer printing for semiconductor manufacturing. Brion is headquartered in Santa Clara, California Santa Clara, California (IPA: /ˌsæntəˈklærə/) , founded in 1777 and incorporated in 1852, is a city in Santa Clara County, in the U.S. state of California. . For more information: www.brion.com or www.ASML.com.

[c] 2008 Brion Technologies. All rights reserved. Brion Technologies, the Brion Technologies logo and Tachyon are trademarks of Brion Technologies.
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Publication:Business Wire
Date:Nov 5, 2008
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