Brion Joint Paper Turns Heads at European Mask and Litho Conference; Named One of Conference's Top Three Papers.SANTA CLARA, Calif. -- Brion Technologies today announced that its co-authored paper, "Using Design Intent to Qualify and Control Lithography Manufacturing," was voted one of the three best papers by attendees at the recent European Mask and Lithography Conference, held in Dresden, Germany. Co-authored by Freescale Semiconductor and Applied Materials, the paper describes a method for addressing the growing disparity between IC designs and the real-world circuit patterns that are ultimately printed on wafers. In the paper, the authors discuss how optical proximity correction Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process effects. The two most common applications for OPC are linewidth differences between features in regions of different density (e. (OPC (1) (OpenGL Performance Characterization) A project group within GPC that manages OpenGL benchmarks. OPC endorses the Viewperf and GLperf benchmarks. Viewperf was created by IBM and OPC provides viewsets for it, which are combinations of tests using specific ) "hot spots hot spots acute moist dermatitis. " can be detected by Brion's Tachyon tachyon (tăk`ēŏn'), hypothetical elementary particle that travels only at speeds exceeding that of light. According to the theory of relativity, the speed of light is the limiting velocity for all ordinary material particles. lithography design verification products and then measured and monitored on the Applied VeritySEM metrology system using its OPC Check solution. The approach significantly improves manufacturing, predictability, yield and control in low-k1 lithography. "We're delighted that conference attendees saw significance and value in the work between Brion and our esteemed co-authors from Freescale and Applied. It's an honor to be recognized in such a prestigious forum," said Eric Chen, chief executive officer of Brion. "Our joint effort clearly demonstrates results that enable faster time to market and lower risk of yield loss. In addition, we've shown that full-chip lithography simulation is a powerful, predictable tool that can be used to drive and optimize OPC designs." Joint authors of the paper are Jim Vasek, Bill Wilkinson, Dave Smith, Al Reich and Cesar Garza, all of Freescale Semiconductor; Youval Nehmadi, Moshe Poyastro, Zamir Abraham and Brian Troy from Applied Materials; and Brion's Jim Wiley and Joyce Zhao. The paper also is scheduled for presentation during the 31st annual SPIE SPIE International Society for Optical Engineering SPIE Society of Photo-Optical Instrumentation Engineers SPIE Source Path Isolation Engine SPIE Special Purpose Insertion Extraction SPIE Software Process Improvement Experimentation SPIE Standard Protocols in Effect Microlithography conference being held February 19-24, 2006 in San Jose, Calif. About EMLC EMLC Electrochemically Modulated Liquid Chromatography 2006 A three-day event three-day event a competition in the pleasure horse sport comprising usually one day each for dressage, cross country and show jumping. , the European Mask and Lithography Conference is dedicated to the science, technology, engineering and application of mask technologies, of lithography technologies, and of associated technologies (like data processing, resist, metrology, inspection and application). This conference is an internationally recognized meeting in its 22nd year. It annually has brought together scientists, researchers, engineers and developers from research institutes and companies to present papers at the forefront of the technologies mentioned above. The conference gives an overview of the present status in mask and lithography technologies and their future strategies. It provides a place where mask makers, mask users and their tool suppliers find the opportunity of becoming acquainted with new development and results. The conference also gives experts the opportunity to meet with leading experts in fields of common interest. About Brion Technologies Brion Technologies, Inc. is the pioneer and leader in Lithography-Driven Design & Manufacturing(TM). Founded in 2002, the privately held company privately held company A firm whose shares are held within a relatively small circle of owners and are not traded publicly. is headquartered in Santa Clara, California Santa Clara, California (IPA: /ˌsæntəˈklærə/) , founded in 1777 and incorporated in 1852, is a city in Santa Clara County, in the U.S. state of California. . Brion's Tachyon(TM) platform, a highly accurate and ultra-fast data and simulation engine, enables a unique set of capabilities that address the interrelated in·ter·re·late tr. & intr.v. in·ter·re·lat·ed, in·ter·re·lat·ing, in·ter·re·lates To place in or come into mutual relationship. in challenges of design, photomask making and wafer printing in semiconductor microlithography. The company leads the worldwide emerging market of optical proximity correction (OPC) verification, and is expanding its product portfolio. For further information, visit Brion Technologies' Web site at www.brion.com or call +1 (408) 653-1500. Lithography-Driven Design & Manufacturing and Tachyon are trademarks of Brion Technologies, Inc. |
|

Printer friendly
Cite/link
Email
Feedback
Reader Opinion