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Beta Squared to Develop Inductively Coupled Plasma Technology for Microelectronic Mechanical Systems; Cooperative Research and Development Agreement Signed with the U.S. Army.


ALLEN, Texas--(BUSINESS WIRE)--June 28, 1999--

Beta Squared, Inc., a subsidiary of Photronics, Inc. (Nasdaq:PLAB), and the U.S. Army's Missile, Research, Development and Engineering Center (MRDEC MRDEC Missile Research, Development and Engineering Center/Command ) agreed to jointly research and develop plasma etch processes and enhanced chamber designs utilizing Beta's Inductively Coupled Plasma An inductively coupled plasma (ICP) is a type of plasma source in which the energy is supplied by electrical currents which are produced by electromagnetic induction, that is, by time-varying magnetic fields.  Source (ICP (1) (Internet Cache Protocol) A protocol used by one proxy server to query another for a cached Web page without having to go to the Internet to retrieve it. See CARP and proxy server. ).

MRDEC and Beta Squared are working toward developing advanced ICP technologies and processes required to support the fabrication of high performance Microelectronic Mechanical Systems (MEMS (MicroElectroMechanical Systems) Tiny mechanical devices that are built onto semiconductor chips and are measured in micrometers. In the research labs since the 1980s, MEMS devices began to materialize as commercial products in the mid-1990s. ) and other related semiconductor technologies. Financial terms of the multi-year agreement were not disclosed.

According to the agreement, Beta Squared will have the responsibility for designing, building and testing etch chambers equipped with their proprietary ICP plasma source. This high-density source is the product of a joint development agreement with the University of Texas at Dallas History
The university was originally started as a research arm of Texas Instruments as the Graduate Research Center of the Southwest in 1961. The institute (by then renamed the Southwest Center for Advanced Studies) which at the time was located at Southern Methodist
 and has a patent pending. MRDEC will focus its expertise on developing processes for etching a variety of semiconductor and polymer materials, as well as provide Beta Squared with data and feedback on the performance of their ICP system.

"The engineering team at Beta Squared has been actively developing an ICP source which we believe will address MRDEC's technology and performance requirements. This technology will be fitted to an existing etch system platform currently installed at the MRDEC facility located at the Redstone Arsenal, Huntsville, Alabama. This offers Beta Squared a unique opportunity to gain valuable intellectual property rights for process chemistries which can be used for deep silicon trench etching," stated John J. Festa, Vice President of Beta Squared's Plasma Division. "Furthermore, this agreement strengthens Beta Squared's reputation among the leading plasma research institutions. We have been identified as an organization capable of providing innovative and exciting new plasma-based solutions for the purpose of etching and cleaning all manner of substrates. This includes PLASMAX(TM), Beta Squared's revolutionary dry cleaning technology that the Company is presently developing for cleaning NeXT Generation Lithography masks with funding assistance from International SEMATECH SEMATECH Semiconductor Manufacturing Technology ."

William C. McCorkle, Technical Director for USAAMCOM added, "Changes in our Country's military strategies have brought about higher performance standards for the MEMS technologies now playing increasingly critical roles in today's aerospace and smart weapons systems. Together with Beta Squared, MRDEC is actively engaged in identifying and implementing improvements in ICP technology and processes that are necessary to meet these requirements."

PLASMAX(TM) was developed jointly by Beta Squared and Los Alamos National Labs (LANL LANL - Los Alamos National Laboratory, Los Alamos, NM, USA. ). It is an in-situ dry plasma cleanER designed to remove sub-micron particles in an environmentally friendly process step by utilizing inert gases inert gases (i·nertˑ gaˑ·ss),
n.
, mechanical vibration and inherent forces present in a plasma environment. The technology is capable of cleaning either a semiconductor wafer or mask substrate mask within 25 seconds. The Company is examining ways in which it can incorporate this organic contaminate cleaning technology into a truly integrated cleaning solution by developing a proprietary particle contaminate cleaning system for both semiconductor wafers and masks.

Beta Squared is a wholly owned subsidiary Wholly Owned Subsidiary

A subsidiary whose parent company owns 100% of its common stock.

Notes:
In other words, the parent company owns the company outright and there are no minority owners.
 of Photronics, Inc., a leading global supplier of photomask manufacturing technology and services. Beta Squared is headquartered in Allen, Texas, where it designs, builds and services a large installed base of plasma etch and wafer dry cleaning systems.

"Safe Harbor Safe Harbor

1. A legal provision to reduce or eliminate liability as long as good faith is demonstrated.

2. A form of shark repellent implemented by a target company acquiring a business that is so poorly regulated that the target itself is less attractive.
" Statement under the Private Securities Litigation Reform Act The Private Securities Litigation Reform Act of 1995 (PSLRA) implemented several significant substantive changes affecting certain cases brought under the federal securities laws, including changes related to pleading, discovery, liability, class representation and awards fees and  of 1995: Except for historical information, the matters discussed in this news release that may be considered forward-looking statements may be subject to certain risks and uncertainties that could cause the actual results to differ materially from those projected, including uncertainties in the market, pricing competition, procurement and manufacturing efficiencies, and other risks detailed from time to time in the Company's SEC reports. The Company assumes no obligation to update the information in this release.
COPYRIGHT 1999 Business Wire
No portion of this article can be reproduced without the express written permission from the copyright holder.
Copyright 1999, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Date:Jun 28, 1999
Words:609
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