Barrier Film: No. 7,288,311; Sayaka Kawashima, Minoru Komada and Shinya Satou, assignors to Dai Nippon Printing Co., Ltd., Tokyo, Japan.

Barrier Film: No. 7,288,311; Sayaka Kawashima, Minoru Komada and Shinya Satou, assignors to Dai Nippon Printing Co., Ltd., Tokyo, Japan. Filed 2/9/04. Issued 10/30/07.

Patented is a barrier film comprising a base material film and a barrier layer on at least one side surface of the base material film. The barrier layer comprises a water repellent layer and a dense layer. The water repellent layer is a silicon oxide carbide film with the atomic percent of Si:O:C m a range of 100:40 to 120:80 to 160, and a 2 to 300nm thickness. The dense layer is a silicon oxide carbide film with the atomic percent of Si:O:C in a range of 100:100 to 200:5 to 100, and a 5-300 nm thickness. The base material is a resin film having a 5-500 Im thickness. The barrier layer has a laminated structure with the dense layer sandwiched between two water repellent layers.