BOC Edwards and AIXTRON Enter into Supply Arrangement for Integrated Vacuum Pump and Abatement System.

CRAWLEY, England -- BOC Edwards (LSE:BOC) announced today that it has entered into an agreement with AIXTRON AG, a leading manufacturer of MOCVD (metal-organic chemical vapor deposition) process tools, to supply its Zenith III-V integrated pump and abatement system to compound semiconductor customers for arsenide and phosphide MOCVD applications.

"This arrangement is intended to provide our customers with many benefits including savings associated with rapid installation of a fully functional turnkey vacuum and abatement subsystem interfaced to the process tool, and released by AIXTRON to be compatible with their system," said Brian Emslie, semiconductor business development director at BOC Edwards. "AIXTRON's technical leadership in the compound semiconductor market combined with our worldwide support infrastructure gives customers the ability to source the process tool, vacuum pumping and exhaust system from a single source, aiming to ensure maximum uptime and improved maintenance intervals."

The Zenith III-V is a fully integrated abatement and pump solution for MOCVD applications incorporating inward-fired combustion technology (Helios), reliable iH Series dry pumps, pipework heating and an integrated control strategy. The system provides high-quality treatment of toxic, compound semiconductor process exhaust gases and organometallic precursors in addition to the handling of hydrogen flows.

Dr. Frank Schulte, senior department manager, product marketing at AIXTRON said, "This is an important addition to our existing capabilities as the leading tool supplier for phosphide applications in the compound semiconductor market. BOC Edwards' key role as a dry vacuum pump and abatement solutions provider combined with its global service infrastructure footprint means that we are collaborating with an important subsystem supplier to better serve our customers. We expect they will achieve improved cost of ownership from this integrated approach."

BOC Edwards will continue to sell its full range products and services directly to end users for all other applications.

BOC Edwards, part of The BOC Group (NYSE:BOX, LSE:BOC), is a leading supplier of materials, process-enabling subsystems and services to fabs and OEMs involved in the manufacture of microelectronics devices. Serving two million customers in more than 50 countries, The BOC Group is one of the largest and most global of the world's leading gases companies, with annual sales of GBP 4.6 billion (more than US $8 billion) in 2004. Information on the BOC Group can be accessed by visiting the Group web site, www.boc.com. Specific information on BOC Edwards can be found at www.bocedwards.com. E-mail inquires can be sent to [e-mail].

AIXTRON AG (FSE: AIX; ISIN DE0005066203) is a leading provider of equipment for compound semiconductor epitaxy. The Company's products are used by a diverse range of customers worldwide to manufacture advanced semiconductor components such as HBTs, PHEMTs, MESFETs, Lasers, LEDs, Detectors, and VCSELs used in fiber optic communication systems, wireless and mobile telephony applications, optical storage devices, illumination, signaling and lighting, as well as a range of other leading-edge technologies. AIXTRON AG's securities are listed in the Prime Standard market segment of the Frankfurt Stock Exchange and are included both in the TecDAX index and the MSCI World Index. More information about AIXTRON can be found at www.aixtron.com.