BOC Edwards Trimethylsilane Qualifications Indicate Widespread Acceptance in 200 and 300 mm Fabs.

SAN FRANCISCO -- BOC Edwards (NYSE:BOX) (LSE:BOC), a global leader in the supply of electronic materials for microelectronics manufacturing, has reported significant progress in qualifying its PureFilm(TM) trimethylsilane in volume production. The company's electronic materials group reports that it has qualified its 99.999% trimethylsilane on both 200 mm and 300 mm platforms as the primary low k dielectric at semiconductor fabs in the U.S. Additional product qualifications are in progress.

BOC Edwards supplies trimethylsilane with a unique 99.999% purity specification, and a complete analysis for common gas and metals impurities is available on all cylinders.

Trimethylsilane ((CH3)3SiH) is used in CVD (chemical vapor deposition) processes for the development of low k dielectric thin film.

Editor Background

BOC Edwards, part of The BOC Group (NYSE:BOX) (LSE:BOC), is a leading supplier of materials, process-enabling subsystems and services to fabs and OEMs involved in the manufacture of microelectronics devices. Serving two million customers in more than 50 countries, The BOC Group is one of the largest and most global of the world's leading gases companies, with annual sales of GBP 4.6 billion (more than US$8 billion) in 2004. Information on the BOC Group can be accessed by visiting the Group web site, www.boc.com. Specific information on BOC Edwards can be found at www.bocedwards.com. E-mail inquiries can be sent to [e-mail].