BOC Edwards Generation-F80 Fluorine Generator Fully Qualified on TELFORMULA Semiconductor Tool.

TOKYO -- Successful qualification program indicates F80(TM) good complement to TELFORMULA(TM) platform

BOC Edwards (NYSE:BOX), a global supplier of materials and subsystems for electronics manufacturing, announced today it has successfully completed a two-year fluorine qualification program with Tokyo Electron Limited (TEL), Japan, a major manufacturer of semiconductor production equipment. The BOC Edwards' Generation-F80 prototype fluorine generator has supplied up to 80 l/hr to multiple TELFORMULA 300 mm LPCVD tools at TEL/AT's Tohoku, Japan facility.

"We have experienced good cleaning performance in the process developed for the TELFORMULA tool using BOC Edwards on-site fluorine generation system," said Yasuyuki Kuriki, TEL vice president and general manager, thermal processing systems. "On-site fluorine generation represents a new paradigm for the industry's chamber cleaning requirements, and BOC Edwards has brought excellent service and fluorine expertise to the effort."

On-site fluorine generation provides the semiconductor industry with an alternative to PFC-based chamber cleans. BOC Edwards has developed fluorine supply solutions that incorporate product delivery, maintenance, service and abatement components. "Fluorine gas supplied in this way has the potential to offer a substantial reduction in the cost of ownership compared with other perfluorocarbons and cylinder fluorine," said Noel Leeson, president of electronic materials for BOC Edwards. "Our experience in providing fluorine generation systems includes commercial installations in 300 mm production fabs and large-scale systems for LCD plants."

Editor Background

BOC Edwards, part of The BOC Group (NYSE:BOX), is a leading supplier of materials, process-enabling subsystems and services to fabs and OEMs involved in the manufacture of microelectronics devices. Serving two million customers in more than 50 countries, The BOC Group is one of the largest and most global of the world's leading gases companies, with annual sales of over GBP 4.3 billion (more than US $7 billion) in 2003. Information on the BOC Group can be accessed by visiting the Group web site, www.boc.com. Specific information on BOC Edwards can be accessed directly on www.bocedwards.com or e-mail: [e-mail].

TEL, established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. In Japan, TEL also distributes computer network related products and electronic components of global leading suppliers. To support this diverse product base, TEL has strategically located around the world. TEL is a publicly held company listed on the Tokyo stock Exchange- www.tel.com