BOC Edwards Continues to Support Industry Growth in Taiwan with Delivery of Bulk Special Gas Systems; 300 mm High-Flow Rate Gas Applications Present Unique Challenges.

TAIPEI, Taiwan -- BOC Edwards, a major supplier of materials, equipment and services to the world's microelectronics manufacturers, today announced the delivery of two SpectraSure bulk special gas systems (BSGS) to support 300 mm high-flow applications at a new semiconductor foundry in Taiwan. The SpectraSure delivery equipment features the BOC Edwards intelligent Gas Source Controller (iGSC) control system, and is designed to support start-up and on-going production for nitrous oxide (N2O) and nitrogen trifluoride (NF3) processes.

Dozens of BSGS systems from BOC Edwards have been installed in Asia, the U.S. and U.K. in recent years, and have proved to be cost effective as well as extremely safe and reliable. The SpectraSure(TM) bulk special gas system sets the standard for providing customers with uninterrupted service in high-flow gas applications.

"Our customers rely on an equipment design that satisfies the process tool configuration for their unique application," said Mike Marmaro, global product manager for special gas equipment at BOC Edwards. "They want assurance that gas flow rates will be maintained if processing conditions change in the future, and we can provide the required flexibility."

The application of high-flow rate gases in 300 mm process environments is becoming even more prevalent as more large fabs are being built. However, unique challenges encountered in high-flow applications, including liquefaction and cooling, can result in process interruptions, and still require every system to be designed and tested for each distinct application. BOC Edwards is able to meet these demanding specifications through the use of proprietary software and predictive modeling. Engineers can validate requirements by testing the prototype design under a variety of scenarios including ambient conditions, tool configurations, and anticipated fab throughput before the systems goes into production.

Editor Background

BOC Edwards, part of The BOC Group (NYSE:BOX) (LSE:BOC), is a leading supplier of materials, process-enabling subsystems and services to fabs and OEMs involved in the manufacture of microelectronics devices. Serving two million customers in more than 50 countries, The BOC Group is one of the largest and most global of the world's leading gases companies, with annual sales of GBP 4.6 billion (more than US $8 billion) in 2004. Information on the BOC Group can be accessed by visiting the Group web site, www.boc.com. Specific information on BOC Edwards can be found at www.bocedwards.com. E-mail inquires can be sent to [e-mail].