BOC Edwards Books Second Large Order with Elpida for Zenith Integrated Vacuum and Abatement Systems.

SAN FRANCISCO -- In a move to support Elpida's commitment to environmental manufacturing, BOC Edwards (NYSE:BOX)(LSE:BOC), a leading materials, equipment and services supplier to microelectronics manufacturing industries, announced today it will supply a Japanese DRAM supplier with multiple Zenith CVD integrated vacuum and abatement systems. The Zenith Series provides fully-integrated abatement and vacuum pump solutions for treatment of toxic process exhaust gases and precursors in addition to the handling of high flows of hydrogen. Elpida Memory, Inc. will install the systems in their new 300 mm wafer fabrication facility, E300-Fab 2, scheduled for startup in December 2005. These systems follow an earlier series of Zenith systems supplied for the customer's initial install phase at this site.

"A major consideration from Elpida was local support and the Zenith's ability to address specific process requirements," said Hiroshi Kasano, president and CEO, BOC Edwards Japan. "With space being at a premium in any 300 mm fab, the Zenith's small footprint was another key feature."

The Zenith CVD range is offered with a choice of modules that includes a thermal processor unit, a thermal conditioning system, and the Helios or Kronis abatement module to suit specific customer requirements.

"The ability to rapidly install the Zenith is critical, reducing the time to first silicon," Kusano added. "An integrated approach delivers numerous benefits including enhanced safety and reduced cost of ownership compared to standalone abatement and pumping systems."

Editor background

BOC Edwards, part of The BOC Group (NYSE:BOX, LSE:BOC), is a leading supplier of materials, process-enabling subsystems and services to fabs and OEMs involved in the manufacture of microelectronics devices. Serving two million customers in more than 50 countries, The BOC Group is one of the largest and most global of the world's leading gases companies, with annual sales of GBP 4.6 billion (more than US$8 billion) in 2004. Information on the BOC Group can be accessed by visiting the Group web site, www.boc.com. Specific information on BOC Edwards can be found at www.bocedwards.com. E-mail inquiries can be sent to [e-mail].