Axcelis to Present at the 5th Annual D.A. Davidson & Co. Technology Conference.

BEVERLY, Mass. -- Axcelis Technologies, Inc. (Nasdaq: ACLS) is pleased to announce that Stephen Bassett, executive vice president and chief financial officer, and Donald Palette, senior vice president and corporate controller, will be presenting at the 5th Annual D.A. Davidson & Co. Technology Conference. This year's conference will be held February 22-23, 2007, at the Ritz-Carlton Hotel in Phoenix, Arizona.

Bassett and Palette will present on Thursday, February 22, at 2:00p.m. MT. For those who cannot be present at the conference, the presentation will be available via live webcast and archived for 30 days, accessible on our Web site at www.axcelis.com.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis has key product development centers in Beverly, Massachusetts, as well as in Saijo, Japan through its joint venture, SEN Corporation, an SHI and Axcelis Company. The company's Internet address is: www.axcelis.com.