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Axcelis Wins Major Follow-on Order for Dry Strip Tools.


Leading Memory Manufacturer Orders over 10 RadiantStrip Systems Based on Demonstrated Reliability and Process Flexibility

BEVERLY, Mass. -- Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc. (NASDAQ NASDAQ
 in full National Association of Securities Dealers Automated Quotations

U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on
: ACLS ACLS
abbr.
advanced cardiac life support
) has received a significant follow-on order for over 10 RadiantStrip 320 photoresist dry strip systems from a major memory device manufacturer. Designed for 300mm front-end-of-line cleaning applications, the dual-chamber systems will be used in the customer's fabs at multiple global sites supporting high-volume device production. The systems will begin to ship in the first quarter.

The RadiantStrip 320 has been adopted by customers worldwide for its ability to effectively address a wide range of post-implant and post-etch cleaning applications, including the fast, complete and uniform removal of heavily implanted photoresist.

"Our customer's order for multiple RadiantStrip 320 systems confirms our platform's long track record of reliability and process versatility in the most demanding environments," said Mary Puma, chairman and CEO (1) (Chief Executive Officer) The highest individual in command of an organization. Typically the president of the company, the CEO reports to the Chairman of the Board.  of Axcelis. "It is ideally suited to their diverse production requirements, supporting multi-temperature stripping and heavily implanted photoresists. This ensures high productivity and compatibility with current and next-generation materials."

Axcelis designed the RadiantStrip 320 for dependability and productivity in high-volume, low cost-of-ownership manufacturing environments. The machine offers a modular and scalable platform for bulk photoresist strip, advanced polymer removal and complete dry clean processes in the same chamber.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. , provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation Ion implantation

A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material.
, rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. , and cleaning and curing systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: www.axcelis.com.
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Copyright 2007, Gale Group. All rights reserved. Gale Group is a Thomson Corporation Company.

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Publication:Business Wire
Date:Feb 7, 2007
Words:289
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