Axcelis Wins Follow-On Plasma Asher Order From Major Foundry in China; Strong Local Support and Dry Strip Tool Reliability Help Make Axcelis Supplier of Choice.Business/Technology Editors BEVERLY, Mass.--(BUSINESS WIRE)--May 22, 2002 Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. Inc. (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on : ACLS ACLS abbr. advanced cardiac life support ), has received a follow-on order for multiple FusionGemini Plasma Asher tools from a major foundry based in Shanghai, China. Axcelis is a supplier of choice for this foundry, and this latest order demonstrates Axcelis' growing strength as a top supplier to China's growing semiconductor industry. "Axcelis has become a supplier of choice through a dedicated effort to provide a reliable toolset with robust local support in Shanghai. This order not only reflects the strength of our partnership with our customers, but also the growth of Axcelis in China," said Jan-Paul van Maaren, vice president and general manager of Axcelis Curing and Cleaning Systems. "Our ability to partner locally with foundry customers means they readily benefit from Axcelis' process expertise and total support capability. This sale confirms Axcelis' position as a supplier of choice for cleaning and curing solutions at 0.18(mu)m technology in China. We look forward to continuing our work here on dry strip technologies, using the reliability and productivity of the FusionGemini tools as our foundation." Axcelis recently opened a service and support facility in Shanghai to provide customers direct access to advanced IC manufacturing equipment and applications development. As one of the first semiconductor equipment suppliers in China over two decades ago, Axcelis has supported this foundry throughout the launch and ramp of its first fab in Shanghai. Last year, the same foundry ordered a suite of equipment from Axcelis that included ion implant, rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. , curing and cleaning systems. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. , provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation Ion implantation A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material. , rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland Rockville is the county seat of Montgomery County, Maryland, United States. According to the 2006 census update, the city had a total population of 59,114, making it the second largest city in Maryland. as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address There are two kinds of addresses that are widely used on the Internet. One is a person's e-mail address, and the other is the address of a Web site, which is known as a URL. Following is an explanation of Internet e-mail addresses only. For more on URLs, see URL and Internet domain name. is: www.axcelis.com. Forward-Looking Statements This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Certain risks and uncertainties could cause actual results to differ materially from those currently anticipated as expressed in this press release. Among other factors, such risks and uncertainties include the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K Form 10-K A report required by the SEC from exchange-listed companies that provides for annual disclosure of certain financial information. Form 10-K See 10-K. filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission. |
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