Axcelis Wins Customer Placements for RapidCure FC Systems; Film curing platform gaining momentum for next-generation device development.

BEVERLY, Mass. -- Axcelis Technologies, Inc. (NASDAQ: ACLS) has secured two new customer placements for its RapidCure FC film curing system. The customers, located in the United States and Asia, are deploying Axcelis' RapidCure technology for a wide variety of emerging UV assisted curing applications critical to the development of sub-65nm devices. The systems began shipping in the second quarter.

UV curing is fast becoming an enabling technology in next-generation device development, allowing chipmakers to change or enhance the properties of materials used to build advanced transistor structures. The new RapidCure FC placements, for example, will be used to enhance the mechanical and electrical properties of both CVD-based and spin-on low-k films so they can be adopted for 45nm devices. The tool also will be used to repair transistors through UV annealing, improve transistor speed with silicon nitride film curing and remove charge build-up in advanced non-volatile memory devices.

Axcelis' curing technology is based on a proprietary microwave-driven, electrode-less UV lamp design and manufacturing process; this unique capability enables Axcelis to tailor the curing process to each customer's application needs. Mary Puma, chairman and CEO of Axcelis, noted that device manufacturers are moving quickly to adopt Axcelis' UV curing technology. "Device makers see real value in UV curing applications, especially those powered by Axcelis' electrode-less UV bulb. Because we design and manufacture our own bulbs and optical systems in house, we can tap into a broad UV spectrum and improve processes by tuning the light source to target a customer's specific needs. This ability opens endless possibilities for customers to gain a competitive advantage," Puma said.

With more than 20 years of experience, Axcelis remains the leader in curing technology and holds over 80% of the photostabilization market for resist curing.

Axcelis representatives will be available to discuss the RapidCure FC and UV assisted curing applications during the International Interconnect Technology Conference (IITC), to be held June 5-7, 2006. Interested parties are invited to stop by the Axcelis booth, #315, at the Hyatt Regency Hotel in Burlingame, CA.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN Corporation, an SHI and Axcelis Company. The company's Internet address is: www.axcelis.com.

Forward-Looking Statements

This press release includes certain statements, known as "forward-looking statements," which express the current expectations of Axcelis management. Product manufacturing and delivery issues, customer order push-outs or cancellations and product performance could cause actual results to differ materially from those currently anticipated as expressed in this press release. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other filings from time to time with the Securities and Exchange Commission.