Axcelis Technologies to Present at the Goldman Sachs Technology Investment Symposium.

Business Editors/High-Tech Writers

BEVERLY, Mass.--(BUSINESS WIRE)--Feb. 17, 2004

Axcelis Technologies, Inc. (Nasdaq: ACLS), is pleased to announce that Mary Puma, president and CEO, and Mark Namaroff, director of investor relations, will be presenting at the Goldman Sachs Technology Investment Symposium. This year's conference will be held February 23-25, 2004, at the Arizona Biltmore in Phoenix, Ariz.

Puma and Namaroff will be presenting on Monday, February 23 at 10:00 a.m. MT. For those who cannot attend, the presentation will be available via live Webcast and archived for 30 days, accessible on the Axcelis Web site at www.axcelis.com.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.