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Axcelis Technologies Names Victor Benveniste Fellow; Six Other Technologists Recognized in Distinguished Scientists Program.


Business/Technology Editors

BEVERLY, Mass.--(BUSINESS WIRE)--Feb. 13, 2002

Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc. (NASDAQ NASDAQ
 in full National Association of Securities Dealers Automated Quotations

U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on
: ACLS ACLS
abbr.
advanced cardiac life support
), today announced that seven technologists have been recognized for their outstanding technical contributions to the company. Axcelis has appointed Victor Benveniste as the company's first Fellow, while selecting William DiVergilio, Qingyuan Han, Jeff Hebb, Alan Janos, Robert Rathmell and Hans Rutishauser as Distinguished Scientists.

"These engineers and scientists represent the lifeblood of our company. The Axcelis Fellows and Distinguished Scientists program is designed to recognize the talent and contributions of these individuals," said John Poate, Axcelis' chief technology officer. "The Axcelis Fellow is the highest technical award and accolade in the company. Victor Benveniste, the company's first Fellow, exemplifies the talents and personality traits we wish to honor. A natural inventor, Victor is a pre-eminent designer of ion implantation Ion implantation

A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material.
 systems, and his concepts are seen in our market-leading product suite. Equally important to Axcelis is Victor's role as a highly respected mentor to our junior technologists.

"We are also honoring our first cadre of Distinguished Scientists, all of whom have made a seminal contribution to Axcelis," Poate added. "We are fortunate to have such talent guiding our technology programs. This kind of excellence is central to Axcelis' ongoing success in the marketplace."

Benveniste, has been with Axcelis for more than 20 years and currently serves as senior chief scientist working in Axcelis' technology development group. Benveniste's contributions have been instrumental in the development of ion implantation beamline and platform designs, wafer handling systems and overall implanter technology innovations. He has authored numerous papers on ion implantation technology and has been awarded 24 patents, with eight additional patents pending. He holds a master's degree master's degree
n.
An academic degree conferred by a college or university upon those who complete at least one year of prescribed study beyond the bachelor's degree.

Noun 1.
 in electrical engineering electrical engineering: see engineering.
electrical engineering

Branch of engineering concerned with the practical applications of electricity in all its forms, including those of electronics.
 from Ecole Centrale des Arts at Metiers in Belgium.

These scientists have contributed to the over 450 patents in Axcelis' intellectual property portfolio as well as the 400 patents pending worldwide. Together, the six Distinguished Scientists hold more than 25 patents and have published more than 300 papers and presentations related to semiconductor processing.

They include:

William DiVergilio, chief scientist for ion implantation Linac and RF technology group.

Qingyuan Han, PhD, senior scientist in the curing and cleaning technology group.

Jeff Hebb, PhD, process development manager for rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less.  systems.

Alan Janos, PhD, principal scientist currently working on UV process technology development.

Robert Rathmell, PhD, chief scientist for medium current ion implantation systems.

Hans Rutishauser, PhD, senior chief engineer currently working on beam controls automation

The Axcelis Fellows and Distinguished Scientist program recognizes those individuals who make significant contributions to the company through research, inventions, patents, roadmap development and other technology-related activities; all recipients must also strive to promote innovation through mentorship and team leadership.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts Beverly is a city in Essex County, Massachusetts, United States. The population was 39,862 at the 2000 census. A resort, residential and manufacturing community, Beverly includes Beverly Farms and Prides Crossing. , provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key technology centers in Beverly, Massachusetts, and Rockville, Maryland Rockville is the county seat of Montgomery County, Maryland, United States. According to the 2006 census update, the city had a total population of 59,114, making it the second largest city in Maryland.  as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address There are two kinds of addresses that are widely used on the Internet. One is a person's e-mail address, and the other is the address of a Web site, which is known as a URL. Following is an explanation of Internet e-mail addresses only. For more on URLs, see URL and Internet domain name.  is: www.axcelis.com.
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Publication:Business Wire
Date:Feb 13, 2002
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