Axcelis Technologies Celebrates Sale of 500th Gemini Tool, The FusionGemini ES; Marks Milestone Sale to European Semiconductor Manufacturer.Business/Technology Editors BEVERLY, Mass.--(BUSINESS WIRE)--April 18, 2001 Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc., (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on : ACLS ACLS abbr. advanced cardiac life support ), today commemorated the sale of its 500th FusionGemini system, a FusionGemini ESTM (Enhanced Strip) purchased by a world-renowned European semiconductor manufacturer. Selected in part because of Axcelis' commitment to customer service, support, training and the advancement of process technology, the FusionGemini ES also provides this long-time customer with high yield at a low cost of ownership, allowing for superior products and margins needed to stay ahead in a competitive market. "The long, prosperous relationship between Axcelis and this particular customer is one that we greatly value and continue to honor," said Michael Dreyer, Vice President and General Manager of Axcelis Technologies Photoresist Processing Division, "Unlike competitive platforms, the FusionGemini ES tool eliminates the need for multiple post-strip cleaning processes, saving time and money. The FusionGemini platform also creates cross-tool commonality that reduces spares inventories, and minimizes training and service requirements." The FusionGemini ES is designed and manufactured to meet the demands and productivity requirements of advanced IC manufacturing, including the elimination of "wet" chemical processing previously needed to remove post strip residues. The FusionGemini ES provides the "dry" solution through the use of specialized gas chemistries, resulting in dry strip processes that require a single follow-up DI water rinse. Resist strip and residue removal are performed in the same chamber, providing high throughput and rapid parallel processing parallel processing, the concurrent or simultaneous execution of two or more parts of a single computer program, at speeds far exceeding those of a conventional computer. . The FusionGemini ES provides the lowest damage of any residue removal-capable plasma asher in the industry. Radiant heating radiant heating: see heating. radiant heating Heating system in which heat is transmitted by radiation from a heated surface. Radiant heating systems usually employ either electric-resistance wiring or hot-water heating pipes, which may embedded in enables multi-temperature stripping for the fastest processes, while eliminating resist "popping" and residues. An Axcelis-proprietary designed plasma source Plasma sources generate plasmas. Excitation of a plasma requires partial ionisation of neutral atoms and/or molecules of a medium. There are several ways to cause ionisation: collisions of energetic particles, strong electric fields acting on bond electrons, or ionising , containing no tuning stubs stubs The shares of equity in a firm that is financed almost completely with debt. Stubs are often created when firms go through a leveraged buyout or pay big cash dividends in order to fend off a takeover. , optimizes the plasma source over the entire operating range. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity manufacturing solutions for the semiconductor industry. Axcelis is dedicated to the design and manufacture of high current, medium current and high energy ion implantation equipment, rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. systems, photostabilization and photoresist stripping equipment. Axcelis Technologies has manufacturing facilities in Beverly and Rockville, Maryland, as well as in Toyo, Japan through its joint venture Sumitomo Eaton Nova. The company's Internet address is: http://www.axcelis.com. |
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