Axcelis Technologies Announces Order for Complete Suite of Ion Implantation Equipment From Texas Instruments.

Business/Technology Editors

BEVERLY, Mass.--(BUSINESS WIRE)--Jan. 3, 2001

Systems will include `Implant Network Option' enabling process

optimization and remote operation

Axcelis Technologies, Inc. (NASDAQ: ACLS), formerly Eaton Semiconductor Equipment Operations, today announced a multi-million dollar order to supply multiple ion implantation systems to Texas Instruments' fab expansion in Freising, Germany. This order includes High Current, High Energy and Medium Current ion implantation systems. The tools will be used in TI's BiCMOS semiconductor manufacturing facility. Installation of the equipment is scheduled to be completed by March 2001.

"Texas Instruments' Freising team chose Axcelis equipment for its fab expansion based on the high productivity performance of our systems, and our ability to meet their aggressive time to production goals," said Mike Luttati, sr. vice president and general manager of Axcelis' ion implant & thermal processing systems group. "The overriding economic advantage of our tool suite, which combines both serial and multi-wafer processing capability and versatile applications coverage across the tool set, will provide TI with the superior performance and economics needed to develop their most advanced devices. These new systems will join an installed base of Axcelis high energy systems, creating a complete suite of Axcelis implanters in the implant bay. Continuing our longstanding relationship with Texas Instruments, the world leader in Digital Signal Processing (DSP) and analog, further demonstrates Axcelis' commitment to the technology leaders of the IC industry."

The Axcelis Technologies line of implanters is built with an integrated design approach. Common components, user interface, and entire subsystems across the product line provide optimal spares, maintenance, and training efficiency. In addition, the mix of implanter architectures, both serial and multiwafer, support overlapping applications providing the most flexible manufacturing toolset available. The ability to meet the entire range of implant process requirements enables Axcelis to deliver the lowest cost of ownership (CoO) and highest overall equipment effectiveness (OEE).

The synergy of the tool set is further enhanced by the "Implant Network Option" (INO) feature. This added capability is designed to aid in process optimization and equipment performance activities. The software allows for remote command and access of data files of multiple implanters from a selected end user's computer workstation. Users of the remote computing software will be able to edit recipes, issue control instructions and access data from the process engineering or maintenance engineering offices without interrupting production operation or host communication.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity manufacturing solutions for the semiconductor industry. Axcelis is dedicated to the design and manufacture of high current, medium current and high energy ion implantation equipment; rapid thermal processing systems; and photostabilization and photoresist stripping equipment. Axcelis Technologies has manufacturing facilities in Beverly and Rockville, Maryland, as well as in Toyo, Japan through its joint venture Sumitomo Eaton Nova. The company's Internet address is: www.axcelis.com.

Statements in this press release regarding the timing of the completion of installation of tools covered by the purchase order and other anticipatory statements are forward-looking statements that involve risks and uncertainties. These uncertainties include, but are not limited to technological or business delays or difficulties, and other risks detailed in Axcelis's Form S-1 Registration Statement on file with the Securities and Exchange Commission and in subsequent filings by Axcelis with the Commission.