Axcelis Technologies Announces Management Change.

BEVERLY, Mass. -- Axcelis Technologies, Inc. (NASDAQ: ACLS) today announced that Mary G. Puma, President and CEO, and other members of the Axcelis executive management team will share the responsibilities held by Michael J. Luttati, executive vice president and chief operating officer, who will be leaving the Company effective May 27, 2005. Mr. Luttati will become the chief executive officer of a publicly traded supplier to the semiconductor industry. In line with the Company's recent operational restructuring initiatives, Axcelis will not be replacing Luttati.

"Mike expressed his interest in furthering his career and becoming a chief executive officer some time ago," said Mary Puma, President and CEO. "As a result we were able to plan for an orderly transition. On behalf of everyone at Axcelis, I would like to express my thanks to Mike for all he has done to help establish us as the leader in ion implantation technology and wish him well in his new position."

Safe Harbor Statement

This document contains forward-looking statements under the SEC safe harbor provisions, including those relating to the assumption of Mike Luttati's responsibilities by members of Axcelis' executive management team. These statements are based on management's current expectations and should be viewed with caution. They are subject to various risks and uncertainties, many of which are outside the control of the Company, including the conversion of orders to revenue in any particular quarter, or at all, our ability to implement successfully our profit plans, the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with and purchases by major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic, political and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other documents filed from time to time with the Securities and Exchange Commission.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis Technologies has key product development centers in Beverly, Massachusetts, as well as in Toyo, Japan through its joint venture, SEN. The company's Internet address is: www.axcelis.com.