Axcelis Technologies Announces Launch of High Current Low Energy Ion Implanter; GSDIII/LED Designed Specifically for Ultra Shallow Junction Formation.Business/Technology Editors BEVERLY, Mass.--(BUSINESS WIRE)--June 19, 2000 Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc., formerly Eaton Semiconductor Equipment Operations, has enhanced its' proven and reliable GSD GSD German Shepherd Dog GSD Graduate School of Design GSD Glycogen Storage Disease GSD General Services Division GSD Gundam Seed Destiny (anime) GSD Ground Sample Distance GSD Geometric Standard Deviation platform into the low energy arena with the introduction of the new GSDIII/LED (Low Energy Decel) ion implantation Ion implantation A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material. system. The system's extended low energy capability enables the GSDIII/LED to cover the full range of production low energy, high dose applications, which enable ultra shallow junction formation at 180nm and below. The GSDIII/LED combines the high productivity and proven reliability of the GSD series platform with a new high transmission beam line in a low energy system. With this introduction, customers worldwide are being offered the next generation high current implanter based on the industry's benchmark for high current productivity and innovation. With the GSD Series platform installed base exceeding 650 units, the IC industry has clearly embraced this IC manufacturing workhorse work·horse n. 1. Something, such as a machine, that performs dependably under heavy or prolonged use: "the 50-year-old DC-3 ... . With the introduction of the latest member of the GSD family, the GSDIII/LED ensures a production-proven, low energy, high dose ion implant solution designed specifically to manufacture the most advanced CMOS (Complementary Metal Oxide Semiconductor) Pronounced "c-moss." The most widely used integrated circuit design. It is found in almost every electronic product from handheld devices to mainframes. devices. "Axcelis is proud to introduce the GSDIII/LED which meets the productivity, reliability and process control needs of the high current ion implanter market. With optimized beam utilization and integrated process control, this system offers the highest productivity for manufacturing applications and advanced device technologies down to 100nm," said David Duff, Director of Marketing, Axcelis Technologies. "In tandem Adv. 1. in tandem - one behind the other; "ride tandem on a bicycle built for two"; "riding horses down the path in tandem" tandem with our Summit RTP (1) (Rapid Transport Protocol) The protocol used in IBM's High Performance Routing (HPR) system. (2) (Realtime Transport Protocol) An IP protocol that supports real time transmission of voice and video. tool, the GSDIII/LED provides the precise process control required for ultra shallow junction formation. We are extremely excited by the inherent stability of our low energy implant and RTP platforms which will be an absolute requirement for ultra shallow junction formation in volume manufacturing." The GSDIII/LED offers reliable performance from 80keV down to 200eV covering traditional high current applications for manufacturing as well as ultra shallow junction processes for advanced device development. High productivity is guaranteed with the industry's fastest and most reliable batch wafer handling architecture that minimizes overhead time, including five second repositioning time for quad implants. Integrated real time dose control further improves productivity by increasing beam utilization while offering the process control necessary to build advanced devices. The most advanced xenon-based plasma charge neutralization neutralization, chemical reaction, according to the Arrhenius theory of acids and bases, in which a water solution of acid is mixed with a water solution of base to form a salt and water; this reaction is complete only if the resulting solution has neither acidic nor ensures alignment with the accelerated SIA Sia (sī`ə) or Siaha (sī`əhə), in the Bible, family returned from the Exile. SIA - Serial Interface Adaptor roadmap by providing the safest charging protection for devices with ultra-thin gate oxides. The improved beam current performance and extended operational life of a new Extended Life Source(TM) allow high system availability at high throughput for low energy operation. About Axcelis Technologies, Inc. For more information on Axcelis, please visit: www.axcelis.com |
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