Axcelis Technologies, Inc. Receives Multiple Order for Photostabilizers.Business/Technology Editors BEVERLY, Mass.--(BUSINESS WIRE)--Aug. 22, 2000 Dual Chamber Photostabilizer System of Choice for North American North American named after North America. North American blastomycosis see North American blastomycosis. North American cattle tick see boophilusannulatus. Integrated Communications Manufacturer Axcelis Technologies Axcelis Technologies, Inc. NASDAQ: ACLS engages in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. , Inc, (NASDAQ NASDAQ in full National Association of Securities Dealers Automated Quotations U.S. market for over-the-counter securities. Established in 1971 by the National Association of Securities Dealers (NASD), NASDAQ is an automated quotation system that reports on :ACLS ACLS abbr. advanced cardiac life support ) formerly Eaton Semiconductor Equipment Operations, and manufacturers of ion implantation Ion implantation A process that utilizes accelerated ions to penetrate a solid surface. The implanted ions can be used to modify the surface composition, structure, or property of the solid material. , rapid thermal processing Rapid Thermal Processing (or RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (up to 1200 C or greater) on a timescale of several seconds or less. (RTP (1) (Rapid Transport Protocol) The protocol used in IBM's High Performance Routing (HPR) system. (2) (Realtime Transport Protocol) An IP protocol that supports real time transmission of voice and video. ), photoresist dry strip and photostabilization tools, today announced that a global leader in integrated communications has placed multi-million dollar orders for 10 FusionGemini Photostabilizers. The systems will be installed in the company's North American IC manufacturing facilities throughout the year. "This order signifies our customer's confidence in photostabilization technology and the productivity advantages it offers this valued client," said Mary Puma, president of Axcelis Technologies, Inc. "Axcelis' FusionGemini Photostabilizers' first-to-market technology is critical to assuring the accurate transfer of original patterns after the lithography process, resulting in a tremendous cost savings to IC manufacturers." The FusionGemini Photostabilizer preserves critical dimensions and boosts the performance of etch and implant processes. By producing a cross-linked, stable resist layer and locking in the photoresist pattern, the FusionGemini enables photoresist mask uniformity while minimizing process variation and improving photoresist stability, sidewall side·wall n. 1. A wall that forms the side of something. 2. A side surface of an automobile tire, between the edge of the tread and the wheel rim. Noun 1. integrity and high current/high energy high dosage implants. This customer selected the FusionGemini system based on the tool's photoresist pre-treatment capability before etch and implant steps, which allows high yields in smart technology manufacturing. Axcelis has more than 15 years of photostabilizer experience with an installed base of more than 2,000 photostabilizers worldwide. About Axcelis Technologies, Inc. Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity manufacturing solutions for the semiconductor industry. Axcelis is dedicated to the design and manufacture of high current, medium current and high energy ion implantation equipment; fast ramp vertical furnaces and rapid thermal processing systems; and photostabilization and photoresist stripping equipment. Axcelis Technologies has manufacturing facilities in Beverly and Rockville, Maryland, as well as in Toyo, Japan through its joint venture with Sumitomo Eaton Nova. The company's Internet address is: www.axcelis.com. |
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