Axcelis Ships Optima HD to Major Memory Chipmaker.

Follow-on order will join growing installed base of Optima high dose implanters at customer's facility

BEVERLY, Mass. -- Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced that it shipped another Optima HD implanter to one of the world's top memory manufacturers, fulfilling a recently announced order. This customer has integrated multiple Optima HDs at its fab, where the implanters are running in volume production. The Optima HD is the industry's only implanter that addresses both traditional high dose implants as well as an expanding range of applications at the 45nm technology node and beyond, including molecular and hydrogen implants. The Optima HD continues to gain market momentum and customer acceptance with chipmakers around the globe.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete lifecycle support of ion implantation, rapid thermal processing, and cleaning and curing systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is www.axcelis.com.